Abstract:The rapid development of micro-electro-mechanical systems (MEMS) and some other related fields allows us to venture into a research area in which the surface effects dominate most of the phenomena. This paper introduces the microscale elastic theory of adhesive contact, which is often encountered in MEMS fabrication. By analyzing two dimensionless parameters, Tabor number and adhesion parameter, and their influence on adhesive forces, we point out the scale effect that is implicit in the existing adhesive e...