EVOLVING MATERIAL STRUCTURES OF SMALL FEATURE SIZES
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摘要:现代的电子和光子器件都是小特征尺寸的固体结构.在制造和使用中,扩散过程能够重置物质,因此结构随时间演化.薄膜可能破裂成小滴(droplets),导线上可能长出孔穴.人们早就知道应力和电流是驱动这些变化的力.这些力尽管重要,但越来越多的事实表明,它们不足以说明各种不同的试验现象,这说明其它物理来源的力也起作用.在结构中,原子、电子和光子的集体作用都对结构的自由能作出贡献.结构一旦改变其构形,其自由能也发生变化.自由能的改变定义了一种热力学的力,它反过来驱动结构的构形变化.本文通过一些特别的现象来阐明这些概念.重点放在不同来源的力的物理描述上,这些来源包括弹性、静电、毛细作用、电流、成分梯度、光子散射和电子约束.其中一些力的作用在小特征尺寸例如几nm到几百nm的结构中尤为重要.随着仪器的小型化,对这些力的认识变得日益重要.这一领域的研究极有希望带来固体力学的革新.Abstract:Modern electronic and photonic devices are solid structures of small feature sizes. During fabrication and use, diffusive processes can relocate matter, so that the structures evolve over time. A film may break into droplets, and a conducting line may grow cavities. Stress and electric current have long been understood as forces that drive the changes. Evidence has accumulated that, while important, these forces are insufficient to account for diverse experimental phenomena, suggesting forces of other physical origins also operate. Ina structure, collective actions of atoms, electrons, and photonscontribute to the free energy. When the structure changes itsconfiguration, the free energy also changes. The free energy change defines a thermodynamic force which, in its turn, drives the configurational change of the structure. This article illustrates the concepts with specific phenomena. Emphasis is placed on physical descriptions of forces of diverse origins, including elasticity, electrostatics, capillarity, electric current, composition gradient, photon dispersion, and electron confinement. The effects of some of these forces are particularly significant in structures of small feature sizes, say, between a few to hundreds of nanometers. Insights into these forces are increasingly valuable as devices miniaturize. This area of research holds great promises for solid mechanics innovation.
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Key words:
- structural evolution/
- small feature size/
- freeenergy/
- self-assembly/
- driving force
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