Abstract: Active flow control isrelated to the flowmechanism and aircraft researches with real time anddynamic features. It becomes possible only after the applications ofMEMS technology MEMS technology has opened a newterritory for active flow control, and considerably accelerated the progressof active flow control technology. The fundamental principle, the keytechnologies and the mechanism that how and where MEMS could be used inactive flow controls are discussed briefly in this paper.Advances of micro-sensor, micro-controller, micro-actuator, integrationtechnologies, and their applications such as to leading edge separationvortices of delta wing, to drag reduction, to jet flow and to separationflow of slender bodies are reviewed. All of these showthe merits of active flow control based MEMS, and the potential military andindustry uses.