Design of acoustic/elastic phase gradient metasurfaces: Principles, functional elements, tunability, and coding
-
摘要:声学/弹性超表面是一类亚波长厚度的二维超材料, 具有很强的声波/弹性波操控能力, 在声学成像、通信、隐身、伪装、振动/噪声控制、能量收集、无损检测等领域具有潜在的应用. 本文主要综述了声学/弹性相位梯度超表面的最新发展, 包括设计原理、功能基元设计、波场操控及其应用、可调超表面设计, 以及新兴的数字编码超表面. 最后, 展望了该领域未来的研究方向.Abstract:Acoustic/elastic metasurfaces as a kind of two-dimensional metamaterials are of subwavelength thickness and show remarkable ability of acoustic/elastic wave manipulation. They have potential applications in various fields such as acoustic imaging, communications, cloaking, camouflage, vibration/noise control, energy harvesting, and nondestructive testing. In this review, we mainly summarize recent developments in acoustic/elastic phase gradient metasurfaces, including design principles, design of functional elements, wave field manipulation with applications, design of tunable metasurfaces, as well as the emerging digital coding metasurfaces. At last, we outline the future research directions in this field.
-
图 7(a)透射型空间卷曲基元(Li et al. 2012), (b)通过改变声通道长度实现波前调控(Zhao et al. 2018)
图 8透射型空间卷曲基元. (a)环形锯齿结构(Li et al. 2015b), (b)锥形空间卷曲结构(Xie Y B et al. 2014), (c)空腔共振增强的锯齿结构(Molerón et al. 2014), (d)具有阻抗匹配层的锯齿结构(Jia Z T et al. 2018), (e)类三明治锯齿结构(Zuo et al. 2018a), (f)带螺旋通道的螺旋结构(Zhu X F et al. 2016), (g)由锯齿狭缝组成的超表面(Tang et al. 2015), (h)V形刚性薄板形成的超表面基元(Lan et al. 2017a)
图 9反射型空间卷曲基元. (a)具有锯齿形通道的结构 (Li Y et al. 2013a), (b)锥形迷宫结构 (Wang W Q et al. 2016), (c)类直井基元构成的梳状超表面 (Zhu et al. 2015a)
图 10透射型共振基元. (a)由连接至直通道的亥姆霍兹共振腔串联组成的结构(Li et al. 2015a), (b)用以实现三维准直自加速声束的具有径向相位梯度的轴对称结构(Li & Assouar 2015), (c)用以生成涡旋波的具有周向相位梯度的圆柱形结构 (Jiang et al. 2016a), (d)亥姆霍兹共振腔串联结构(Han et al. 2018), (e)哑铃形共振基元(Dong et al. 2020), (f)薄膜型基元(Zhai et al. 2015), (g)薄膜型混合基元(Lan et al. 2018)
图 11反射型共振基元. (a)亥姆霍兹共振基元(Ding et al. 2015), (b)管状共振器(Zhu & Assouar 2019a), (c)无梯度设计 (左图) 和有梯度设计 (右图) 的亥姆霍兹共振腔串联基元(Li X S et al. 2019), (d)具有刚性背箱的薄膜型基元(Zhai et al. 2016), (e)带有附加质量的薄膜型基元(Chen et al. 2017a), (f)双层板状基元((Ma F Y et al. 2018)
图 12类亥姆霍兹共振基元构建的可实现水声转向的反射超表面(Zhou et al. 2021a). (a)超表面和类亥姆霍兹共振基元, (b)单个基元的相位调控, (c)组装的基元阵列的相位调控(水域由内部声场硬边界隔离以消除声干扰), (d)基于广义斯涅尔定律的超表面所调控的反射场(局部设计), (e)基于格栅衍射理论的超表面所调控的反射场 (非局部设计)
图 13水声功能基元. (a)板状基元(Chen Z et al.2020), (b)多质量共振基元(Zou H Z et al. 2020), (c)多层共振基元(Li P et al. 2020)
图 14五膜材料水声超表面. (a)附加重量处于六边形顶点的五模材料单元(Tian et al. 2015), (b)附加重量处于蜂窝壁中点的五模材料单元(Chen & Hu2019), (c)调控反射波的五模材料超表面(Zhang X D et al. 2020), (d)产生涡旋声波的五模材料超表面(Sun et al. 2021)
图 15弹性波透射型基元. (a)板状基元(Su et al. 2016), (b)复合板状基元(Zeng L H et al. 2019), (c)锯齿形基元(Liu et al. 2017), (d)具有刚度和质量调节子结构的组合共振基元(Lee et al. 2018), (e)具有水平和竖直谐振器的共振基元 (Lee et al. 2020), (f)嵌入共振体的共振基元(Zhu H F et al. 2018), (g)周期立柱阵列基元(Cao et al. 2018c), (h)随机分布立柱阵列基元 (Cao et al. 2020b), (i)仅由一排立柱构成的超表面(Wang et al. 2021a)
图 16弹性波反射型基元. (a)条状基元及超表面(Kim et al. 2020), (b)板边缘粘贴不同厚度条带构成的条状基元(Ruan et al. 2020)
图 17非局部基元. (a)空气通道连接的基元及由局部和非局部超表面调控的反射场对比(Quan &Alú 2019b), (b)具有非局部基元的弹性超表面(Zhu H F et al. 2020), (c)有修饰的周期排列散射体构建的非局部超表面(Schwan et al. 2018), (d)有修饰的圆柱体构建的非局部超表面(Quan et al. 2018), (e)球形亥姆霍兹共振腔构建的非局部超表面(Esfahlani et al. 2021)
图 18双各向异性基元. (a)直通道上连接不同亥姆霍兹共振腔的基元及其非对称性(Li J F et al. 2018), (b)具有解耦波参数的基元及透射和反射波的独立调控(Koo et al. 2016)
图 19拓扑优化基元. (a)具有不对称几何结构的空气声拓扑优化基元(Dong et al. 2022a), (b)同时调控弹性L波和T波的拓扑优化基元(Rong &Ye2020)
图 20组合基元. (a)由空间卷曲结构和直通道组合而成的基元(Tian et al. 2017), (b)相位和幅值的解耦调制(Tian et al.2017), (c)双通道组合基元(Zhu et al. 2021a)
图 21异常折射/反射. (a)回射(Shen C et al. 2018), (b)行波转表面波(Zhai et al. 2015), (c)波束分裂(Li J F et al. 2020), (d)P波和SV波模式分离(Rong &Ye 2020), (e)P波转SV波(Lee et al. 2020), (f)入射面以外的反射波调制(Li X S et al. 2019), (g)弧状超表面实现地毯隐身(Zhou et al. 2021b), (h)从曲面到平面的地表幻象(Li X S et al. 2020), (i)超薄Schroeder扩散器实现扩散散射(Zhu et al. 2017)
图 22波束聚焦和自弯曲. (a)Bessel 波束(Lan et al. 2017b), (b)三维非轴对称点聚焦(Li X S et al. 2020), (c)利用超表面实现能量收集(Qi &Assouar 2017), (d)自弯曲波束的自愈合特性(Zhu X F et al. 2016), (e)具有任意轨迹的二维瓶状波束(Chen et al. 2018d), (f)三维瓶状波束形成的能量空洞(Li X S et al. 2021)
图 23涡旋波. (a)由扭曲螺旋面组成的超表面产生m= 1的涡旋波(Esfahlani et al. 2017), (b)由非局部超表面产生的不同拓扑阶数的涡旋波(Hou et al. 2021), (c)具有非对称零压力中心的涡旋波(Jiang et al. 2020c)
图 24非对称传输的实现. (a)含多个超表面的声通道(Zhu et al. 2015b), (b)一个超表面和一个超材料构成的组合体系(Shen et al. 2016), (c)两个相位梯度超表面(Cao et al. 2018a), (d)单个有损透射超表面(Li et al. 2017), (e)单个有损反射超表面(Song et al. 2019), (f)考虑整数奇偶性的单个无损超表面(Fu et al. 2019b)
图 26机械可重构基元设计. (a)移动滑块(Chen Z et al. 2019), (b)填充水改变腔体尺寸(Tian et al. 2019), (c)填充水改变反射通道的深度(Song et al. 2019c)
图 27利用旋转操作实现机械可重构基元和超表面. (a)扇形可调环状混合共振基元(Wang X L et al. 2020), (b)带有两个C形空腔的嵌套结构(Zhai et al. 2018), (c)带有可调钩槽的基元(Zhou H T et al. 2020), (d)离刚性壁一定距离具有Willis耦合效应的C形超原子(Chiang et al. 2020)
图 28基于螺丝与螺母工作原理的机械可重构基元或超表面. (a)透射型基元(Zhao et al. 2018), (b)反射型基元(Fan S W et al. 2019), (c)产生声涡旋的超表面 (Fan et al. 2020a), (d)具有可调吸收器可实现相位和幅值准解耦调制的基元(Fan et al. 2020c), (e)弹性波基元(Yuan et al. 2020a)
图 29整个超表面的方位调节. (a)旋转整个超表面(Li et al. 2017), (b)改变两个平行超表面之间的距离(Xia et al. 2018)
图 30通过施加偏场实现的可调基元和超表面. (a)数字电路控制的压电薄膜基元(Popa et al. 2015), (b)由两侧带压电传感器的铅层覆盖的空气腔构成的薄膜型基元(Li S L et al. 2021), (c)由压电片和环氧树脂基体所组成的基元构建的主动超表面(Shen et al. 2019), (d)由五个基本单胞组合而成的基元, 其中每个基本单胞通过在基板上粘贴一个连接负电容分流电路的压电换能器构成(Li S L et al. 2018), (e)由电压控制的磁性可调基元和超表面(Chen et al. 2017b)
图 31数字编码超表面. (a)平面1比特编码超表面的远场调控示意图, (b)编码位0和1组成的超表面实现波束分裂功能(Xie et al. 2017b), (c)以正向或反向排列用作逻辑位0或1的非对称基元(Zuo et al. 2019b), (d)用于Talbot自成像的无相位调控 (0型) 和有相位调控 (1-3型) 的编码声学超表面(Gao et al. 2020), (e)由亥姆霍兹共振基元构建的产生涡旋波的反射型3比特编码超表面(Zhang Y et al. 2019), (f)可调1比特编码超表面(Zuo et al. 2019a), (g)机电可编程声学数字编码超表面(Fakheri et al. 2021)
-
Ahn B, Lee H, Lee J S, Kim Y Y. 2019. Topology optimization of metasurfaces for anomalous reflection of longitudinal elastic waves.Comput. Methods Appl. Mech. Eng.,357: 112582.doi:10.1016/j.cma.2019.112582 Aieta F, Genevet P, Yu N, Kats M A, Gaburro Z, Capasso F. 2012. Out-of-plane reflection and refraction of light by anisotropic optical antenna metasurfaces with phase discontinuities.Nano. Lett.,12: 1702-1706.doi:10.1021/nl300204s Aieta F, Kabiri A, Genevet P, Yu N, Kats M A, et al. 2012. Reflection and refraction of light from metasurfaces with phase discontinuities.J. Nanophotonics,6: 063532.doi:10.1117/1.JNP.6.063532 Anhӓuser A, Wunenburger R, Brasselet E. 2012. Acoustic rotational manipulation using orbital angular momentum transfer.Phys. Rev. Lett.,109: 034301.doi:10.1103/PhysRevLett.109.034301 Asadchy V S, Albooyeh M, Tcvetkova S N, Díaz-Rubio A, Ra'di Y, Tretyakov S A. 2016. Perfect control of reflection and refraction using spatially dispersive metasurfaces.Phys. Rev. B,94: 075142.doi:10.1103/PhysRevB.94.075142 Assouar B, Liang B, Wu Y, Li Y, Cheng J C, Jing Y. 2018. Acoustic metasurfaces.Nat. Rev. Mater.,3: 460-472.doi:10.1038/s41578-018-0061-4 Bai G D, Ma Q, Cao W K, Li R Q, Jing H B, et al. 2019. Manipulation of electromagnetic and acoustic wave behaviors via shared digital coding metallic metasurfaces.Adv. Intell. Syst.,1: 1900038.doi:10.1002/aisy.201900038 Bakhtiari-Nejad M, Elnahhas A, Hajj M R, Shahab S. 2018. Acoustic holograms in contactless ultrasonic power transfer systems: Modeling and experiment.J. Appl. Phys.,124: 244901.doi:10.1063/1.5048601 Bar-Ziv U, Postan A, Segev M. 2015. Observation of shape-preserving accelerating underwater acoustic beams.Phys. Rev. B,92: 100301(R).doi:10.1103/PhysRevB.92.100301 Baudoin M, Gerbedoen J C, Riaud A, Matar O B, Smagin N, Thomas J L. 2019. Folding a focalized acoustical vortex on a flat holographic transducer: Miniaturized selective acoustical tweezers.Sci. Adv.,5: eaav1967.doi:10.1126/sciadv.aav1967 Bernard S, Chikh-Bled F, Kourchi H, Chati F, Léon F. 2022. Broadband negative reflection of underwater acoustic waves from a simple metagrating: modeling and experiment.Phys. Rev. Appl.,17: 024059.doi:10.1103/PhysRevApplied.17.024059 Bok E, Park J J, Choi H, Han C K, Wright O B, Lee S H. 2018. Metasurface for water-to-air sound transmission.Phys. Rev. Lett.,120: 044302.doi:10.1103/PhysRevLett.120.044302 Brown M D. 2019. Phase and amplitude modulation with acoustic holograms.Appl. Phys. Lett.,115: 053701.doi:10.1063/1.5110673 Cai L, Wen J H, Yu D L, Lu Z M, Chen X, Zhao X. 2017. Beam steering of the acoustic metasurface under a subwavelength periodic modulation.Appl. Phys. Lett.,111: 201902.doi:10.1063/1.5001954 Cai X B, Huang Z D, Yang J. 2020. Traveling sound wave with transverse particle velocity in a metawaveguide by using a phase-reversible metasurface.Phys. Rev. Appl.,14: 054025.doi:10.1103/PhysRevApplied.14.054025 Cai Z R, Zhao S D, Huang Z D, Li Z, Su M, et al. 2019. Bubble architectures for locally resonant acoustic metamaterials.Adv. Funct. Mater.,29: 1906984.doi:10.1002/adfm.201906984 Cao L Y, Xu Y L, Assouar B, Yang Z C. 2018a. Asymmetric flexural wave transmission based on dual-layer elastic gradient metasurfaces.Appl. Phys. Lett.,113: 183506.doi:10.1063/1.5050671 Cao L Y, Yang Z C, Xu Y L. 2018b. Steering elastic SH waves in an anomalous way by metasurface.J. Sound Vib.,418: 1-14.doi:10.1016/j.jsv.2017.12.032 Cao L Y, Yang Z C, Xu Y L, Assouar B. 2018c. Deflecting flexural wave with high transmission by using pillared elastic metasurface.Smart Mater. Struct.,27: 075051.doi:10.1088/1361-665X/aaca51 Cao L Y, Yang Z C, Xu Y L, Chen Z L, Zhu Y F, et al. 2021. Pillared elastic metasurface with constructive interference for flexural wave manipulation.Mech. Syst. Signal Process.,146: 107035.doi:10.1016/j.ymssp.2020.107035 Cao L Y, Yang Z C, Xu Y L, Fan S W, Zhu Y F, et al. 2020a. Flexural wave absorption by lossy gradient elastic metasurface.J. Mech. Phys. Solids,143: 104052.doi:10.1016/j.jmps.2020.104052 Cao L Y, Yang Z C, Xu Y L, Fan S W, Zhu Y F, et al. 2020b. Disordered elastic metasurfaces.Phys. Rev. Appl.,13: 014054.doi:10.1103/PhysRevApplied.13.014054 Cao W K, Wu, L T, Zhang C, Ke J C, Cheng Q, Cui T J. 2019. A reflective acoustic meta-diffuser based on the coding meta-surface.J. Appl. Phys.,126: 194503.doi:10.1063/1.5120111 Cao W K, Zhang C, Wu L T, Guo K Q, Ke J C, et al. 2021. Tunable acoustic metasurface for three-dimensional wave manipulations.Phys. Rev. Appl.,15: 024026.doi:10.1103/PhysRevApplied.15.024026 Cao X, Jia C L, Miao H C, Kang G Z, Zhang Ch. 2021. Excitation and manipulation of guided shear-horizontal plane wave using elastic metasurfaces.Smart Mater. Struct.,30: 055013.doi:10.1088/1361-665X/abf23e Chaplain G J, De Ponti J M 2022. The elastic spiral phase pipe.J. Sound Vib.,523: 116718 Chen A L, Tang Q Y, Zhao S D, Wang Y S. 2020. Multifunction switching by a flat structurally tunable acoustic metasurface for transmitted waves.Sci. China-Phys. Mech. Astron.,63: 244611.doi:10.1007/s11433-019-1498-2 Chen A L, Wang X M, Wang Y S. 2021. Tunable control and functional switch of transmitted acoustic waves by an arch-shaped metasurface.Chin. J. Theor. Appl. Mech.,53: 789-801 (in Chinese). Chen C, Chen T N, Song A L, Song X P, Zhu J. 2020. Switchable asymmetric acoustic transmission based on topological insulator and metasurfaces.J. Phys. D:Appl. Phys.,53: 44LT01.doi:10.1088/1361-6463/aba5c1 Chen D C, Zhou Q X, Zhu X F, Xu Z, Wu D J. 2019a. Focused acoustic vortex by an artificial structure with two sets of discrete Archimedean spiral slits.Appl. Phys. Lett.,115: 083501.doi:10.1063/1.5108687 Chen D C, Zhu X F, Wei Q, Wu D J. 2018a. Bidirectional asymmetric acoustic focusing by two flat acoustic metasurfaces.Chin. Phys. B,27: 124302.doi:10.1088/1674-1056/27/12/124302 Chen D C, Zhu X F, Wei Q, Wu D J, Liu X J. 2018b. Asymmetric phase modulation of acoustic waves through unidirectional metasurfaces.Appl. Phys. A,124: 13.doi:10.1007/s00339-017-1289-3 Chen D C, Zhu X F, Wei Q, Wu D J, Liu X J. 2018c. Broadband acoustic focusing by Airy-like beams based on acoustic metasurfaces.J. Appl. Phys.,123: 044503.doi:10.1063/1.5010705 Chen D C, Zhu X F, Wei Q, Wu D J, Liu X J. 2018d. Dynamic generation and modulation of acoustic bottle-beams by metasurfaces.Sci. Rep.,8: 12682.doi:10.1038/s41598-018-31066-5 Chen D C, Zhu X F, Wei Q, Yao J, Wu D J. 2020. Broadband tunable focusing lenses by acoustic coding metasurfaces.J. Phys. D:Appl. Phys.,53: 255501.doi:10.1088/1361-6463/ab8247 Chen D C, Zhu X F, Wu D J, Liu X J. 2019b. Broadband Airy-like beams by coded acoustic metasurfaces.Appl. Phys. Lett.,114: 053504.doi:10.1063/1.5080202 Chen H J. 2018. Anomalous reflection of acoustic waves in air with metasurfaces at low frequency.Adv. Cond. Matter Phys.,2018: 1-7. Chen H T, Taylor A J, Yu N F. 2016. A review of metasurfaces: physics and applications.Rep. Prog. Phys.,79: 076401.doi:10.1088/0034-4885/79/7/076401 Chen J, Rao J, Lisevych D, Fan Z. 2019. Broadband ultrasonic focusing in water with an ultra-compact metasurface lens.Appl. Phys. Lett.,114: 104101.doi:10.1063/1.5090956 Chen S, Fan Y C, Y Fan, Sun K Y, Fu Q H, et al. 2021. Coiling-up space metasurface for high-efficient and wide-angle acoustic wavefront steering.Front. Mater.,8: 790987.doi:10.3389/fmats.2021.790987 Chen X, Liu P, Hou Z W, Pei Y M. 2017a. Implementation of acoustic demultiplexing with membrane-type metasurface in low frequency range.Appl. Phys. Lett.,110: 161909.doi:10.1063/1.4981898 Chen X, Liu P, Hou Z W, Pei Y M. 2017b. Magnetic-control multifunctional acoustic metasurface for reflected wave manipulation at deep subwavelength scale.Sci. Rep.,7: 9050.doi:10.1038/s41598-017-09652-w Chen Y and Hu G K. 2019. Broadband and high-transmission metasurface for converting underwater cylindrical waves to plane waves.Phys. Rev. Appl.,12: 044046.doi:10.1103/PhysRevApplied.12.044046 Chen Y Y, Li X P, Nassar H, Hu G K, Huang G L. 2018. A programmable metasurface for real time control of broadband elastic rays.Smart Mater. Struct.,27: 115011.doi:10.1088/1361-665X/aae27b Chen Y, Liu X N, Xiang P, Hu G K. 2016. Pentamode material for underwater acoustic wave control.Adv. Mech.,46: 201609 (in Chinese). Chen Z, Shao S X, Negahban M, Li Z. 2019. Tunable metasurface for acoustic wave redirection, focusing and source illusion.J. Phys. D:Appl. Phys.,52: 395503.doi:10.1088/1361-6463/ab2abd Chen Z, Yan F, Negahban M, Li Z. 2020. Resonator-based reflective metasurface for low-frequency underwater acoustic waves.J. Appl. Phys.,128: 055305.doi:10.1063/5.0006523 Chen Z, Yan F, Negahban M, Li Z. 2021. Extremely thin reflective metasurface for low-frequency underwater acoustic waves: sharp focusing, self-bending, and carpet cloaking.J. Appl. Phys.,130: 125304.doi:10.1063/5.0041092 Cheng B Z, Hou H, Gao N S. 2018. An acoustic metasurface with simultaneous phase modulation and energy attenuation.Mod. Phys. Lett. B,32: 1850276 Chiang Y K, Oberst S, Melnikov A, Quan L, Marburg S, Alù A, Powell D A. 2020. Reconfigurable acoustic metagrating for high efficiency anomalous reflection.Phys. Rev. Appl.,13: 064067.doi:10.1103/PhysRevApplied.13.064067 Chiang Y K, Quan L, Peng Y, Sepehrirahnama S, Oberst S, et al. 2021. Scalable metagrating for efficient ultrasonic focusing.Phys. Rev. Appl.,16: 064014.doi:10.1103/PhysRevApplied.16.064014 Chu Y Y, Wang Z H, Xu Z. 2020. Broadband high-efficiency controllable asymmetric propagation by pentamode acoustic metasurface.Phys. Lett. A,384: 126230.doi:10.1016/j.physleta.2019.126230 Courtney C R P, Demore C E M, Wu H X, Grinenko A, Wilcox P D, et al. 2014. Independent trapping and manipulation of microparticles using dexterous acoustic tweezers.Appl. Phys. Lett.,104: 154103.doi:10.1063/1.4870489 Craig S R, Su X S, Norris A, Shi C Z. 2019. Experimental realization of acoustic bianisotropic gratings.Phys. Rev. Appl.,11: 061002.doi:10.1103/PhysRevApplied.11.061002 Cui T J, Qi M Q, Wan X, Zhao J, Cheng Q. 2014. Coding metamaterials, digital metamaterials and programmable metamaterials.Light Sci. Appl.,3: e218.doi:10.1038/lsa.2014.99 Deng Z L, Li X P, Li G X. 2020. Metasurface holography.Synth. Lect. Mater. Opt.,1: 1-76. Díaz-Rubio A, Tretyakov S A. 2017. Acoustic metasurfaces for scattering-free anomalous reflection and refraction.Phys. Rev. B,96: 125409.doi:10.1103/PhysRevB.96.125409 Díaz-Rubio A, Asadchy V S, Elsakka A, Tretyakov S A. 2017. From the generalized reflection law to the realization of perfect anomalous reflectors.Sci. Adv.,3: e1602714.doi:10.1126/sciadv.1602714 Díaz-Rubio A, Li J F, Shen C, Cummer S A, Tretyakov S A. 2019. Power flow-conformal metamirrors for engineering wave reflections.Sci. Adv.,5: eaau7288.doi:10.1126/sciadv.aau7288 Ding C L, Chen H J, Zhai S L, Liu S, Zhao X P. 2015. The anomalous manipulation of acoustic waves based on planar metasurface with split hollow sphere.J. Phys. D:Appl. Phys.,48: 045303.doi:10.1088/0022-3727/48/4/045303 Ding H, Fang X S, Jia B, Wang N Y, Cheng Q, Li Y. 2021. Deep learning enables accurate sound redistribution via nonlocal metasurfaces.Phys. Rev. Appl.,16: 064035.doi:10.1103/PhysRevApplied.16.064035 Ding Y, Statharas E C, Yao K, Huang M H. 2017. A broadband acoustic metamaterial with impedance matching layer of gradient index.Appl. Phys. Lett.,110: 241903.doi:10.1063/1.4986472 Donda K, Zhu Y F, Merkel A, Fan S W, Cao L Y, Wan S, Assouar B. 2021. Ultrathin acoustic absorbing metasurface based on deep learning approach.Smart Mater. Struct.,30: 085003.doi:10.1088/1361-665X/ac0675 Dong H W, Shen C, Zhao S D, Qiu W B, Zhou J, et al. 2022a. Achromatic metasurfaces with inversely customized dispersion for ultra-broadband acoustic beam engineering.Natl. Sci. Rev., epub.https://doi.org/10.1093/nsr/nwac030 Dong H W, Zhao S D, Oudich M, Shen C, Zhang Ch, et al. 2022b. Reflective metasurfaces with multiple elastic mode conversions for broadband underwater sound absorption.Phys. Rev. Appl.,17: 044013.doi:10.1103/PhysRevApplied.17.044013 Dong Y B, Wang Y B, Sun J X, Ding C L, Zhai S L, Zhao X P. 2020. Transmission control of acoustic metasurface with dumbbell-shaped double-split hollow sphere.Mod. Phys. Lett. B,34: 2050386.doi:10.1142/S0217984920503868 Dubois M, Shi C Z, Wang Y, Zhang X. 2017. A thin and conformal metasurface for illusion acoustics of rapidly changing profiles.Appl. Phys. Lett.,110: 151902.doi:10.1063/1.4979978 Esfahlani H, Karkar S, Lissek H, Mosig J R. 2016. Acoustic carpet cloak based on an ultrathin metasurface.Phys. Rev. B,94: 014302.doi:10.1103/PhysRevB.94.014302 Esfahlani H, Lissek H, Mosig J R. 2017. Generation of acoustic helical wavefronts using metasurfaces.Phys. Rev. B,95: 024312.doi:10.1103/PhysRevB.95.024312 Esfahlani H, Mazor Y, Alù A. 2021. Homogenization and design of acoustic Willis metasurfaces.Phys. Rev. B,103: 054306.doi:10.1103/PhysRevB.103.054306 Fakheri M H, Rajabalipanah H, Abdolali A. 2021. Spatiotemporal binary acoustic metasurfaces.Phys. Rev. Appl.,16: 024062.doi:10.1103/PhysRevApplied.16.024062 Fan L J and Mei J. 2020. Metagratings for waterborne sound: Various functionalities enabled by an efficient inverse-design approach.Phys. Rev. Appl.,14: 044003.doi:10.1103/PhysRevApplied.14.044003 Fan S W, Wang Y F, Cao L Y, Zhu Y F, Chen A L, et al. 2020a. Acoustic vortices with high-order orbital angular momentum by a continuously tunable metasurface.Appl. Phys. Lett.,116: 163504.doi:10.1063/5.0007351 Fan S W, Zhao S D, Cao L Y, Zhu Y F, Chen A L, et al. 2020b. Reconfigurable curved metasurface for acoustic cloaking and illusion.Phys. Rev. B,101: 024104.doi:10.1103/PhysRevB.101.024104 Fan S W, Zhao S D, Chen A L, Wang Y F, Assouar M B, Wang Y S. 2019. Tunable broadband reflective acoustic metasurface.Phys. Rev. Appl.,11: 044038.doi:10.1103/PhysRevApplied.11.044038 Fan S W, Zhu Y F, Cao L Y, Wang Y F, Chen A L, et al. 2020c. Broadband tunable lossy metasurface with decoupled amplitude and phase modulations for acoustic holography.Smart Mater. Struct.,29: 105038.doi:10.1088/1361-665X/abaa98 Fan X D, Liang B, Yang J, Cheng J C. 2019. Illusion for airborne sound source by a closed layer with subwavelength thickness.Sci. Rep.,9: 1750.doi:10.1038/s41598-018-38424-3 Fan X D, Zhu Y F, Liang B, Yang J, Cheng J C. 2016. Broadband convergence of acoustic energy with binary reflected phases on planar surface.Appl. Phys. Lett.,109: 243501.doi:10.1063/1.4971795 Fang X S, Wang X, Li Y. 2019. Acoustic splitting and bending with compact coding metasurfaces.Phys. Rev. Appl.,11: 064033.doi:10.1103/PhysRevApplied.11.064033 Fang Y, Zhang X, Zhou J. 2017. Sound transmission through an acoustic porous metasurface with periodic structures.Appl. Phys. Lett.,110: 171904.doi:10.1063/1.4982633 Faure C, Richoux O, Félix S, Pagneux V. 2016. Experiments on metasurface carpet cloaking for audible acoustics.Appl. Phys. Lett.,108: 064103.doi:10.1063/1.4941810 Fu Y Y, Cao Y Y, Xu Y D. 2019a. Multifunctional reflection in acoustic metagratings with simplified design.Appl. Phys. Lett.,114: 053502.doi:10.1063/1.5083081 Fu Y Y, Shen C, Cao Y Y, Gao L, Chen H Y, et al. 2019b. Reversal of transmission and reflection based on acoustic metagratings with integer parity design.Nat. Commun.,10: 2326.doi:10.1038/s41467-019-10377-9 Fu Y Y, Shen C, Zhu X H, Li J F, Liu Y W, et al. 2020a. Sound vortex diffraction via topological charge in phase gradient metagratings.Sci. Adv.,6: eaba9876.doi:10.1126/sciadv.aba9876 Fu Y Y, Tao J Q, Song A L, Liu Y W, Xu Y D. 2020b. Controllably asymmetric beam splitting via gap-induced diffraction channel transition in dual-layer binary metagratings.Front. Phys.,15: 52502.doi:10.1007/s11467-020-0968-2 Fushimi T, Yamamoto K, Ochiai Y. 2021. Acoustic hologram optimisation using automatic differentiation.Sci. Rep.,11: 12678.doi:10.1038/s41598-021-91880-2 Gao H, Gu Z M, Liang B, Zou X Y, Yang J, et al. 2016. Acoustic focusing by symmetrical self-bending beams with phase modulations.Appl. Phys. Lett.,108: 073501.doi:10.1063/1.4941992 Gao H, Gu Z M, Liang S J, An S W, Liu T, Zhu J. 2020. Coding metasurface for Talbot sound amplification.Phys. Rev. Appl.,14: 054067.doi:10.1103/PhysRevApplied.14.054067 Gao L H, Cheng Q, Yang J, Ma S J, Zhao J, et al. 2015. Broadband diffusion of terahertz waves by multi-bit coding metasurfaces.Light Sci. Appl.,4: e324.doi:10.1038/lsa.2015.97 Gao S X, Li Y B, Ma C R, Cheng Y, Liu X J. 2021. Emitting long-distance spiral airborne sound using low-profile planar acoustic antenna.Nat. Commun.,12: 2006.doi:10.1038/s41467-021-22325-7 Ge Y, Sun H X, Yuan S Q, Lai Y. 2018. Broadband unidirectional and omnidirectional bidirectional acoustic insulation through an open window structure with a metasurface of ultrathin hooklike meta-atoms.Appl. Phys. Lett.,112: 243502.doi:10.1063/1.5025812 Ge Y, Sun H X, Yuan S Q, Lai Y. 2019. Switchable omnidirectional acoustic insulation through open window structures with ultrathin metasurfaces.Phys. Rev. Mater.,3: 065203.doi:10.1103/PhysRevMaterials.3.065203 Gerard N JRK, Jing Y. 2020. Loss in acoustic metasurfaces: a blessing in disguise.MRS Commun.,10: 32-41.doi:10.1557/mrc.2019.148 Gerard N JRK, Li Y, Jing Y. 2018. Investigation of acoustic metasurfaces with constituent material properties considered.J. Appl. Phys.,123: 124905.doi:10.1063/1.5007863 Ghaffarivardavagh R, Nikolajczyk J, Holt R G, Anderson S, Zhang X. 2018. Horn-like space-coiling metamaterials toward simultaneous phase and amplitude modulation.Nat. Commun.,9: 1349.doi:10.1038/s41467-018-03839-z Giovampaola C D, Engheta N. 2014. Digital metamaterials.Nat. Mater.,13: 1115-1121.doi:10.1038/nmat4082 Gong K M, Wang X F, Ouyang H J, Mo J L. 2019. Tuneable gradient Helmholtz-resonator-based acoustic metasurface for acoustic focusing.J. Phys. D:Appl. Phys.,52: 385303.doi:10.1088/1361-6463/ab2b85 Gong Z, Baudoin M. 2019. Particle assembly with synchronized acoustic tweezers.Phys. Rev. Appl.,12: 024045.doi:10.1103/PhysRevApplied.12.024045 Gu J C, Lin W, Kan C X. 2020. Sound source localization using piezoelectric acoustic metasurfaces.Acoust. Aust.,48: 455-461.doi:10.1007/s40857-020-00205-2 Gu Z M, Fang X S, Liu T, Gao H, Liang S J, et al. 2021. Tunable asymmetric acoustic transmission via binary metasurface and zero-index metamaterials.Appl. Phys. Lett.,118: 113501.doi:10.1063/5.0046756 Guo X X, Gusev V E, Tournat V. 2019. Frequency-doubling effect in acoustic reflection by a nonlinear, architected rotating-square metasurface.Phys. Rev. E,99: 052209.doi:10.1103/PhysRevE.99.052209 Guo X X, Gusev V E, Bertoldi K, Tournat V. 2018. Manipulating acoustic wave reflection by a nonlinear elastic metasurface.J. Appl. Phys.,123: 124901.doi:10.1063/1.5015952 Guo Z Y, Liu H J, Zhou H, Zhou K Y, Wang S M, et al. 2019. High-order acoustic vortex field generation based on a metasurface.Phys. Rev. E,100: 053315.doi:10.1103/PhysRevE.100.053315 Han L X, Yao Y W, Zhang X, Wu F G, Dong H F, et al. 2018. Acoustic metasurface for refracted wave manipulation.Phys. Lett. A,382: 357-361.doi:10.1016/j.physleta.2017.12.004 He J J, Jiang X, Ta D A, Wang W Q. 2020. Experimental demonstration of underwater ultrasound cloaking based on metagrating.Appl. Phys. Lett.,117: 091901.doi:10.1063/5.0021002 He Q, Sun S L, Zhou L. 2019. Tunable/reconfigurable metasurfaces: physics and applications.Research,2019: 1-16. Hertzberg Y, Navon G. 2011. Bypassing absorbing objects in focused ultrasound using computer generated holographic technique.Med. Phys.,38: 6407-6415.doi:10.1118/1.3651464 Hou Z L, Ding H, Wang N Y, Fang X S, Li Y. 2021. Acoustic vortices via nonlocal metagratings.Phys. Rev. Appl.,16: 014002.doi:10.1103/PhysRevApplied.16.014002 Hou Z L, Fang X S, Li Y, Assouar B. 2019. Highly efficient acoustic metagrating with strongly coupled surface grooves.Phys. Rev. Appl.,12: 034021.doi:10.1103/PhysRevApplied.12.034021 Hur S, Choi H, Yoon G H, Kim N W, Lee D G, Kim Y T. 2022. Planar ultrasonic transducer based on a metasurface piezoelectric ring array for subwavelength acoustic focusing in water.Sci. Rep.,12: 1485.doi:10.1038/s41598-022-05547-7 Hussein M I, Leamy M J, Ruzzene M. 2014. Dynamics of phononic materials and structures: historical origins, recent progress, and future outlook.ASME Appl. Mech. Rev.,66: 040802.doi:10.1115/1.4026911 Jahdali R A, Wu Y. 2016. High transmission acoustic focusing by impedance-matched acoustic meta-surfaces.Appl. Phys. Lett.,108: 031902.doi:10.1063/1.4939932 Jia H, Ke M Z, Li C H, Qiu C Y, Liu Z Y. 2013. Unidirectional transmission of acoustic waves based on asymmetric excitation of Lamb waves.Appl. Phys. Lett.,102: 153508.doi:10.1063/1.4802254 Jia Y R, Ji W Q, Wu D J, Liu X J. 2018. Metasurface-enabled airborne fractional acoustic vortex emitter.Appl. Phys. Lett.,113: 173502.doi:10.1063/1.5051696 Jia Z T, Li J F, Shen C, Xie Y B, Cummer S A. 2018. Systematic design of broadband path-coiling acoustic metamaterials.J. Appl. Phys.,123: 025101.doi:10.1063/1.5009488 Jiang M, Zhou H T, Li X S, Fu W X, Wang Y F, Wang Y S. 2022. Extreme transmission of elastic metasurface for deep subwavelength focusing.Acta Mech. Sin.,38: 121497.doi:10.1007/s10409-021-09073-z Jiang X, He J J, Zhang C X, Zhao H L, Wang W Q, et al. 2022. Three-dimensional ultrasound subwavelength arbitrary focusing with broadband sparse metalens.Sci. China-Phys. Mech. Astron.,65: 224311.doi:10.1007/s11433-021-1784-3 Jiang X, Li Y, Zhang L K. 2017. Thermoviscous effects on sound transmission through a metasurface of hybrid resonances.J. Acoust. Soc. Am.,141: EL363-EL368.doi:10.1121/1.4979682 Jiang X, Li Y, Liang B, Cheng J C, Zhang L K. 2016a. Convert acoustic resonances to orbital angular momentum.Phys. Rev. Lett.,117: 034301.doi:10.1103/PhysRevLett.117.034301 Jiang X, Li Y, Ta D, Wang W Q. 2020a. Ultrasonic sharp autofocusing with acoustic metasurface.Phys. Rev. B,102: 064308.doi:10.1103/PhysRevB.102.064308 Jiang X, Liang B, Cheng J C, Qiu C W. 2018. Twisted acoustics: metasurface-enabled multiplexing and demultiplexing.Adv. Mater.,30: 1800257.doi:10.1002/adma.201800257 Jiang X, Liang B, Zou X Y, Yang J, Yin L L, et al. 2016b. Acoustic one-way metasurfaces: asymmetric phase modulation of sound by subwavelength layer.Sci. Rep.,6: 28023.doi:10.1038/srep28023 Jiang X, Shi C, Wang Y, Smalley J, Cheng J, Zhang X. 2020b. Nonresonant metasurface for fast decoding in acoustic communications.Phys. Rev. Appl.,13: 014014.doi:10.1103/PhysRevApplied.13.014014 Jiang X, Ta D, Wang W Q. 2020c. Modulation of orbital-angular-momentum symmetry of nondiffractive acoustic vortex beams and realization using a metasurface.Phys. Rev. Appl.,14: 034014.doi:10.1103/PhysRevApplied.14.034014 Jiang X, Zhao J J, Liu S L, Liang B, Zou X Y, et al. 2016c. Broadband and stable acoustic vortex emitter with multi-arm coiling slits.Appl. Phys. Lett.,108: 203501.doi:10.1063/1.4949337 Jiang Y Q, Liu Y L, Kou M Q, Li H B, Wu X P, et al. 2022. Multi-parameter independent manipulation for flexural wave by notched metasurface.Int. J. Mech. Sci.,214: 106928.doi:10.1016/j.ijmecsci.2021.106928 Jiménez N, Groby J P, García V R. 2021. Spiral sound-diffusing metasurfaces based on holographic vortices.Sci. Rep.,11: 10217.doi:10.1038/s41598-021-89487-8 Jiménez N, Sánchez-Morcillo V J, Picó R, Garcia-Raffi L M, Romero-Garcia V, Staliunas K. 2015. High-order acoustic Bessel beam generation by spiral gratings.Phys. Procedia,70: 245-248.doi:10.1016/j.phpro.2015.08.146 Jiménez-Gambín S, Jiménez N, Camarena F. 2020. Transcranial focusing of ultrasonic vortices by acoustic holograms.Phys. Rev. Appl.,14: 054070.doi:10.1103/PhysRevApplied.14.054070 Jin Y B, Bonello B, Moiseyenko R P, Pennec Y, Boyko O, Djafari-Rouhani B. 2017. Pillar-type acoustic metasurface.Phys. Rev. B,96: 104311.doi:10.1103/PhysRevB.96.104311 Jin Y B, Kumar R, Poncelet O, Mondain-Monval O, Brunet T. 2019. Flat acoustics with soft gradient-index metasurfaces.Nat. Commun.,10: 143.doi:10.1038/s41467-018-07990-5 Jin Y B, Wang W, Khelif A, Djafari-Rouhani B. 2021. Elastic metasurfaces for deep and robust subwavelength focusing and imaging.Phys. Rew. Appl.,15: 024005.doi:10.1103/PhysRevApplied.15.024005 Ju F F, Tian Y, Cheng Y, Liu X J. 2018. Asymmetric acoustic transmission with a lossy gradient-index metasurface.Appl. Phys. Lett.,113: 121901.doi:10.1063/1.5032263 Ju F F, Xiong W, Liu C, Cheng Y, Liu X J. 2019. Acoustic accelerating beam based on a curved metasurface.Appl. Phys. Lett.,114: 113507.doi:10.1063/1.5087544 Ju F F, Zou X, Qian S Y, Liu X J. 2021. Asymmetric acoustic retroflection with a non-Hermitian metasurface mirror.Appl. Phys,. Express,14: 124001. Kim M S, Lee W R, Kim Y Y, Oh J H. 2018. Transmodal elastic metasurface for broad angle total mode conversion.Appl. Phys. Lett.,112: 241905.doi:10.1063/1.5032157 Kim M S, Lee W R, Park C Il, Oh J H. 2020. Elastic wave energy entrapment for reflectionless metasurface.Phys. Rev. Appl.,13: 054036.doi:10.1103/PhysRevApplied.13.054036 Kim S Y, Lee W, Lee J S, Kim Y Y. 2021. Longitudinal wave steering using beam-type elastic metagratings.Mech. Syst. Signal Process.,156: 107688.doi:10.1016/j.ymssp.2021.107688 Koo S, Cho C, Jeong J H, Park N. 2016. Acoustic omni meta-atom for decoupled access to all octants of a wave parameter space.Nat. Commun.,7: 13012.doi:10.1038/ncomms13012 Kumar S, Lee H P. 2020. Recent advances in acoustic metamaterials for simultaneous sound attenuation and air ventilation performances.Crystals,10: 686.doi:10.3390/cryst10080686 Kushwaha M S, Halevi P, Dobrzynski L, Djafari-Rouhani B. 1993. Acoustic band structure of periodic elastic composites.Phys. Rev. Lett.,71: 2022-2025.doi:10.1103/PhysRevLett.71.2022 Lan J, Li Y F, Liu X Z. 2017a. Broadband manipulation of refracted wavefronts by gradient acoustic metasurface with V-shape structure.Appl. Phys. Lett.,111: 263501.doi:10.1063/1.5005950 Lan J, Li Y F, Xu Y, Liu X Z. 2017b. Manipulation of acoustic wavefront by gradient metasurface based on Helmholtz resonators.Sci. Rep.,7: 10587.doi:10.1038/s41598-017-10781-5 Lan J, Zhang X W, Liu X Z, Li Y F. 2018. Wavefront manipulation based on transmissive acoustic metasurface with membrane-type hybrid structure.Sci. Rep.,8: 14171.doi:10.1038/s41598-018-32547-3 Lawrence A J, Goldsberry B M, Wallen S P, Haberman M R. 2020. Numerical study of acoustic focusing using a bianisotropic acoustic lens.J. Acoust. Soc. Am.,148: EL365-EL370.doi:10.1121/10.0002137 Lee H, Lee J K, Seung H M, Kim Y Y. 2018. Mass-stiffness substructuring of an elastic metasurface for full transmission beam steering.J. Mech. Phys. Solids,112: 577-593.doi:10.1016/j.jmps.2017.11.025 Lee S W, Oh J H. 2020. Single-layer elastic metasurface with double negativity for anomalous refraction.J. Phys. D:Appl. Phys.,53: 265301.doi:10.1088/1361-6463/ab7fd6 Lee S W, Seung H M, Choi W, Kim M, Oh J H. 2020. Broad-angle refractive transmodal elastic metasurface.Appl. Phys. Lett.,117: 213502.doi:10.1063/5.0026928 Lee S W, Shin Y J, Park H W, Seung H M, Oh J H. 2021. Full-wave tailoring between different elastic media: A double-unit elastic metasurface.Phys. Rev. Appl.,16: 064013.doi:10.1103/PhysRevApplied.16.064013 Lee T, Iizuka H. 2020. Sound propagation across the air/water interface by a critically coupled resonant bubble.Phys. Rev. B,102: 104105.doi:10.1103/PhysRevB.102.104105 Li B, Hu Y B, Chen J L, Su G Y, Liu Y Q, et al. 2020. Efficient asymmetric transmission of elastic waves in thin plates with lossless metasurfaces.Phys. Rev. Appl.,14: 054029.doi:10.1103/PhysRevApplied.14.054029 Li C H, Ke M Z, Ye Y T, Xu S J, Qiu C Y, Liu Z Y. 2014. Broadband asymmetric acoustic transmission by a plate with quasi-periodic surface ridges.Appl. Phys. Lett.,105: 023511.doi:10.1063/1.4890721 Li J, Pendry J B. 2008. Hiding under the carpet: a new strategy for cloaking.Phys. Rev. Lett.,101: 203901.doi:10.1103/PhysRevLett.101.203901 Li J F, Díaz-Rubio A, Shen C, Jia Z T, Tretyakov S A, Cummer S A. 2019. Highly efficient generation of angular momentum with cylindrical bianisotropic metasurfaces.Phys. Rev. Appl.,11: 024016.doi:10.1103/PhysRevApplied.11.024016 Li J F, Shen C, Díaz-Rubio A, Tretyakov S A, Cummer S A. 2018. Systematic design and experimental demonstration of bianisotropic metasurfaces for scattering-free manipulation of acoustic wavefronts.Nat. Commun.,9: 1342.doi:10.1038/s41467-018-03778-9 Li J F, Song A L, Cummer S A. 2020. Bianisotropic acoustic metasurface for surface-wave-enhanced wavefront transformation.Phys. Rev. Appl.,14: 044012.doi:10.1103/PhysRevApplied.14.044012 Li P, Chang Y F, Du Q J, Xu Z H, Liu M Y, Peng P. 2020. Continuously tunable acoustic metasurface with rotatable anisotropic three-component resonators.Appl. Phys. Express,13: 025507.doi:10.35848/1882-0786/ab6f27 Li S L, Wu J W, Yao Y X, Tang J. 2021. Tunable reflected acoustic wave front modulated with piezoelectric metasurfaces.J. Phys. D:Appl. Phys.,54: 095102.doi:10.1088/1361-6463/abc917 Li S L, Xu J W, Tang J. 2018. Tunable modulation of refracted Lamb wave front facilitated by adaptived elastic metasurfaces.Appl. Phys. Lett.,112: 021903.doi:10.1063/1.5011675 Li W B, Meng F, Huang X D. 2020. Coding metalens with helical-structured units for acoustic focusing and splitting.Appl. Phys. Lett.,117: 021901.doi:10.1063/5.0012784 Li X S, Wang Y F, Wang Y S. 2022. Sparse binary metasurfaces for steering the flexural waves.Extreme Mech. Lett.,52: 101675.doi:10.1016/j.eml.2022.101675 Li X S, Wang Y F, Chen A L, Wang Y S. 2019. Modulation of out-of-plane reflected waves by using acoustic metasurfaces with tapered corrugated holes.Sci. Rep.,9: 15856.doi:10.1038/s41598-019-52441-w Li X S, Wang Y F, Chen A L, Wang Y S. 2020. An arbitrarily curved acoustic metasurface for three-dimensional reflected wave-front modulation.J. Phys. D:Appl. Phys.,53: 195301.doi:10.1088/1361-6463/ab7327 Li X S, Zhou H T, Wang Y F, Wang Y S. 2021. Modulation of acoustic self-accelerating beams with tunable curved metasurfaces.Appl. Phys. Lett.,118: 023503.doi:10.1063/5.0035286 Li X, Zhou Y, Yang Z Z, Zou X Y, Cheng J C. 2022. Tunable acoustic metasurface based on PVDF/polyimide unimorph sheets.Appl. Phys. Express,15: 014001.doi:10.35848/1882-0786/ac414b Li Y, Assouar M B. 2015. Three-dimensional collimated self-accelerating beam through acoustic metascreen.Sci. Rep.,5: 17612.doi:10.1038/srep17612 Li Y, Jiang X, Li R Q, Liang B, Zou X Y, Yin L L, Cheng J C. 2014. Experimental realization of full control of reflected waves with subwavelength acoustic metasurfaces.Phys. Rev. Appl.,2: 064002.doi:10.1103/PhysRevApplied.2.064002 Li Y, Jiang X, Liang B, Cheng J C, Zhang L. 2015a. Metascreen-based acoustic passive phased array.Phys. Rev. Appl.,4: 024003.doi:10.1103/PhysRevApplied.4.024003 Li Y, Liang B, Gu Z M, Zou X Y, Cheng J C. 2013a. Reflected wavefront manipulation based on ultrathin planar acoustic metasurfaces.Sci. Rep.,3: 2546.doi:10.1038/srep02546 Li Y, Liang B, Tao X, Zhu X F, Zou X Y, Cheng J C. 2012. Acoustic focusing by coiling up space.Appl. Phys. Lett.,101: 233508.doi:10.1063/1.4769984 Li Y, Liang B, Zou X Y, Cheng J C. 2013b. Extraordinary acoustic transmission through ultrathin acoustic metamaterials by coiling up space.Appl. Phys. Lett.,103: 063509.doi:10.1063/1.4817925 Li Y, Qi S B, Assouar M B. 2016. Theory of metascreen-based acoustic passive phased array.New J. Phys.,18: 043024.doi:10.1088/1367-2630/18/4/043024 Li Y, Ren Z W, Yuan X J, Chen M J, Cao W K, et al. 2019. Reflection phase dispersion editing generates wideband invisible acoustic Huygens's metasurface.J. Acoust. Soc. Am.,146: 166-171.doi:10.1121/1.5116012 Li Y, Shen C, Xie Y, Li J, Wang W, et al. 2017. Tunable asymmetric transmission via lossy acoustic metasurfaces.Phys. Rev. Lett.,119: 035501.doi:10.1103/PhysRevLett.119.035501 Li Y, Yu G, Liang B, Zou X, Li G, et al. 2015b. Three-dimensional ultrathin planar lenses by acoustic metamaterials.Sci. Rep.,4: 6830.doi:10.1038/srep06830 Liang B, Cheng J C, Qiu C W. 2018. Wavefront manipulation by acoustic metasurfaces: from physics and applications.Nanophotonics,7: 1191-1205.doi:10.1515/nanoph-2017-0122 Liang D L, Hu G R, Ding N, Ma Q Y, Guo G P, et al. 2022. Quasi-Bessel acoustic-vortex beams constructed by the line-focused phase modulation for a ring-array of sectorial planar transducers.IEEE Trans. Ultrason. Ferr.,69: 377-385.doi:10.1109/TUFFC.2021.3120285 Liang Q X, Cheng Y, He J, Chang J K, Chen T N, Li D C. 2018. Ultra-broadband acoustic diode in open bend tunnel by negative reflective metasurface.Sci. Rep.,8: 16089.doi:10.1038/s41598-018-34314-w Liang S J, Liu T, Gao H, Gu Z M, An S W, Zhu J. 2020. Acoustic metasurface by layered concentric structures.Phys. Rev. Res.,2: 043362.doi:10.1103/PhysRevResearch.2.043362 Liang Y, Hu Y, Song D H, Lou C B, Zhang X Z, et al. 2015. Image signal transmission with Airy beams.Opt. Lett.,40: 5686.doi:10.1364/OL.40.005686 Liang Z X, Li J. 2012. Extreme acoustic metamaterial by coiling up space.Phys. Rev. Lett.,108: 114301.doi:10.1103/PhysRevLett.108.114301 Liao G X, Luan C C, Wang Z W, Liu J P, Yao X H, Fu J Z. 2021. Acoustic metamaterials a review of theories, structures, fabrication approaches, and applications.Adv. Mater. Technol.,6: 2000787.doi:10.1002/admt.202000787 Lin Q, Wang J Q, Cai F Y, Zhang R J, Zhao D G, Xia X X, Wang J P, Zheng H R. 2021. A deep learning approach for the fast generation of acoustic holograms.J. Acoust. Soc. Am.,149: 2312-2322.doi:10.1121/10.0003959 Lin Z B, Wang W, Xu W K, Yang T Z. 2022. Topology optimization of single-groove acoustic metasurfaces using genetic algorithms.Arch. Appl. Mech.,92: 961-969.doi:10.1007/s00419-021-02084-z Lin Z B, Xu W K, Xuan C M, Qi W C, Wang W. 2021. Modular elastic metasurfaces with mass oscillators for transmitted flexural wave manipulation.J. Phys. D:Appl. Phys.,54: 255303.doi:10.1088/1361-6463/abee47 Lin Z, Guo X S, Tu J, Ma Q Y, Wu J R, Zhang D. 2015. Acoustic non-diffracting Airy beam.J. Appl. Phys.,117: 104503.doi:10.1063/1.4914295 Liu B Y, Jiang Y Y. 2018. Controllable asymmetric transmission via gap-tunable acoustic metasurface.Appl. Phys. Lett.,112: 173503.doi:10.1063/1.5023852 Liu B Y, Ren B, Zhao J J, Xu X D, Feng Y X, et al. 2017a. Experimental realization of all-angle negative refraction in acoustic gradient metasurface.Appl. Phys. Lett.,111: 221602.doi:10.1063/1.5004005 Liu B Y, Su Z X, Zeng Y, Wang Y T, Huang L L, Zhang S. 2021. Acoustic geometric-phase meta-array.New J. Phys.,23: 113026.doi:10.1088/1367-2630/ac33f2 Liu B Y, Zhao J J, Xu X D, Zhao W Y, Jiang Y Y. 2017b. All-angle negative reflection with an ultrathin acoustic gradient metasurface: Floquet-Bloch modes perspective and experimental verification.Sci. Rep.,7: 13852.doi:10.1038/s41598-017-14387-9 Liu B Y, Zhao W Y, Jiang Y Y. 2016. Full-angle negative reflection realized by a gradient acoustic metasurface.AIP Adv.,6: 115110.doi:10.1063/1.4967430 Liu J J, Liang B, Cheng J C. 2021. Focusing a two-dimensional acoustic vortex beyond diffraction limit on an ultrathin structured surface.Phys. Rev. Appl.,15: 014015.doi:10.1103/PhysRevApplied.15.014015 Liu J J, Liang B, Yang J, Yang J, Cheng J C. 2020. Generation of non-aliased two-dimensional acoustic vortex with enclosed metasurface.Sci. Rep.,10: 3827.doi:10.1038/s41598-020-60836-3 Liu M Y, Li P, Du Q J, Peng P. 2019. Reflected wavefront manipulation by acoustic metasurfaces with anisotropic local resonant units.EPL,125: 54004.doi:10.1209/0295-5075/125/54004 Liu P, Chen X, Xu W D, Pei Y M. 2020. Magnetically controlled multifunctional membrane acoustic metasurface.J. Appl. Phys.,127: 185104.doi:10.1063/1.5145289 Liu T, Chen F, Liang S J, Gao H, Zhu J. 2019. Subwavelength sound focusing and imaging via gradient metasurface-enabled spoof surface acoustic wave modulation.Phys. Rev. Appl.,11: 034061.doi:10.1103/PhysRevApplied.11.034061 Liu Y C, Zhang X, Guo J H, Yang H, Han L X, et al. 2020. Tailoring of diversified sound vortices using curved impedance-matched acoustic metasurfaces.Mod. Phys. Lett. B,34: 2050121. Liu Y L, Li H B, Zhang J, Liu X Y, Wu L K, et al. 2020. Design of elastic metasurfaces for controlling shear vertical waves using uniaxial scaling transformation method.Int. J. Mech. Sci.,169: 105335.doi:10.1016/j.ijmecsci.2019.105335 Liu Y Q, Liang Z X, Liu F, Diba O, Lamb A, Li J. 2017. Source illusion devices for flexural Lamb waves using elastic metasurfaces.Phys. Rev. Lett.,119: 034301.doi:10.1103/PhysRevLett.119.034301 Liu Y, Li Y F, Liu X Z 2019. Manipulation of acoustic wavefront by transmissive metasurface based on pentamode metamaterials.Chin. Phys. B,28: 024301 Liu Z Y, Zhang X X, Mao Y W, Zhu Z Z, Yang Z Y, et al. 2000. Locally resonant sonic materials.Science,289: 1734-1736.doi:10.1126/science.289.5485.1734 Liu H L, Yang Z, Wang W, Xuan C M, Xu W K. 2022. Design of elastic wave metasurfaces based on lattice truss material.Arch. Appl. Mech.,92: 2137-2149.doi:10.1007/s00419-022-02166-6 Luo S S, Hao J J, Ye F J, Li J X, Ruan Y, Cui H Y, Liu W J, Chen L. 2021. Evolution of the electromagnetic manipulation: from tunable to programmable and intelligent metasurfaces.Micromachines,12: 988.doi:10.3390/mi12080988 Luo Y C, Jia Y R, Yao J, Wu D J, Liu X J. 2020. Enhanced fractional acoustic vortices by an annulus acoustic metasurface with multi-layered rings.Adv. Mater. Technol.,5: 2000356. Ma F Y, Huang M, Xu Y C, Wu J H. 2018. Bilayer synergetic coupling double negative acoustic metasurface and cloak.Sci. Rep.,8: 5906.doi:10.1038/s41598-018-24231-3 Ma F Y, Xu Y C, Wu J H. 2019a. Pure solid acoustic metasurface with coating adapter.Appl. Phys. Express,12: 054003.doi:10.7567/1882-0786/ab130c Ma F Y, Xu Y C, Wu J H. 2019b. Shell-type acoustic metasurface and arc-shape carpet cloak.Sci. Rep.,9: 8076.doi:10.1038/s41598-019-44619-z Ma G C, Fan X Y, Sheng P, Fink M. 2018. Shaping reverberating sound fields with an actively tunable metasurface.Proc. Natl. Acad. Sci. U. S. A.,115: 6638-6643.doi:10.1073/pnas.1801175115 Ma Z C, Holle A W, Melde K, Qiu T, Poeppel K, et al. 2020. Acoustic holographic cell patterning in a biocompatible hydrogel.Adv. Mater.,32: 1904181.doi:10.1002/adma.201904181 Marzo A, Drinkwater B W. 2019. Holographic acoustic tweezers.Proc. Natl. Acad. Sci. U. S. A.,116: 84-89.doi:10.1073/pnas.1813047115 Marzo A, Seah S A, Drinkwater B W, Sahoo D R, Long B, Subramanian S. 2015. Holographic acoustic elements for manipulation of levitated objects.Nat. Commun.,6: 8661.doi:10.1038/ncomms9661 Mei J, Wu Y. 2014. Controllable transmission and total reflection through an impedance-matched acoustic metasurface.New J. Phys.,16: 123007.doi:10.1088/1367-2630/16/12/123007 Melde K, Mark A G, Qiu T, Fischer P. 2016. Holograms for acoustics.Nature,537: 518-522.doi:10.1038/nature19755 Memoli G, Caleap M, Asakawa M, Sahoo D R, Drinkwater B W, Subramanian S. 2016. Metamaterial bricks and quantization of meta-surfaces.Nat. Commun.,8: 14608. Milton G W and Cherkaev A V. 1995. Which elasticity tensors are realizable?ASME J. Eng. Mater. Technol.,117: 483-493. Mitri F G. 2016. Airy acoustical-sheet spinner tweezers.J. Appl. Phys.,120: 104901.doi:10.1063/1.4962397 Miyata K, Noguchi Y, Yamada T, Izui K, Nishiwaki S. 2018. Optimum design of a multi-functional acoustic metasurface using topology optimization based on Zwicker's loudness model.Comput. Methods Appl. Mech. Eng.,331: 116-137.doi:10.1016/j.cma.2017.11.017 Molerón M, Serra-Garcia M, Daraio C. 2014. Acoustic fresnel lenses with extraordinary transmission.Appl. Phys. Lett.,105: 114109.doi:10.1063/1.4896276 Molerón M, Serra-Garcia M, Daraio C. 2016. Visco-thermal effects in acoustic metamaterials: from total transmission to total reflection and high absorption.New. J. Phys.,18: 033003.doi:10.1088/1367-2630/18/3/033003 Noguchi Y, Yamada T. 2021. Level set-based topology optimization for graded acoustic metasurfaces using two-scale homogenization.Finite Elem. Anal. Des.,196: 103606 Noguchi Y, Yamada T, Otomori M, Izui K, Nishiwaki S. 2015. An acoustic metasurface design for wave motion conversion of longitudinal waves to transverse waves using topology optimization.Appl. Phys. Lett.,107: 221909.doi:10.1063/1.4936997 Ozcelik A, Rufo J, Guo F, Gu Y Y, Li P, Lata J, Huang T J. 2018. Acoustic tweezers for the life sciences.Nat. Methods,15: 1021-1028.doi:10.1038/s41592-018-0222-9 Park C Il, Piao C G, Lee H, Kim Y Y. 2021. Elastic complementary meta-layer for ultrasound penetration through solid/liquid/gas barriers.Int. J. Mech. Sci.,206: 106619.doi:10.1016/j.ijmecsci.2021.106619 Peng P, Xiao B M, Wu Y. 2014. Flat acoustic lens by acoustic grating with curled slits.Phys. Lett. A,378: 3389-3392.doi:10.1016/j.physleta.2014.09.042 Peng X Y, Li J F, Shen C, Cummer S A. 2021. Efficient scattering-free wavefront transformation with power flow conformal bianisotropic acoustic metasurfaces.Appl. Phys. Lett.,118: 061902.doi:10.1063/5.0033422 Peng Y Y, Chen J H, Yang Z Z, Zou X Y, Tao C, Cheng J C. 2022a. Broadband tunable acoustic metasurface based on piezoelectric composite structure with two resonant modes.Appl. Phys. Express,15: 014004.doi:10.35848/1882-0786/ac444a Peng Y Y, Yang Z Z, Zhang Z L, Zou X Y, Tao C, Cheng J C. 2022b. Tunable acoustic metasurface based on tunable piezoelectric composite structure.J. Acoust. Soc. Am.,151: 838-845.doi:10.1121/10.0009379 Popa B I, Cummer S A. 2014. Non-reciprocal and highly nonlinear active acoustic metamaterials.Nat. Commun.,5: 3398.doi:10.1038/ncomms4398 Popa B I, Shinde D, Konneker A, Cummer S A. 2015. Active acoustic metamaterials reconfigurable in real time.Phys. Rev. B,91: 220303 Popa B I, Zhai Y X, Kwon H S. 2018. Broadband sound barriers with bianisotropic metasurfaces.Nat. Commun.,9: 5299.doi:10.1038/s41467-018-07809-3 Popa B I, Zigoneanu L, Cummer S A. 2013. Tunable active acoustic metamaterials.Phys. Rev. B,88: 024303. Qi S, Assouar B. 2017. Acoustic energy harvesting based on multilateral metasurfaces.Appl. Phys. Lett.,111: 243506.doi:10.1063/1.5003299 Qi S, Li Y, Assouar B. 2017. Acoustic focusing and energy confinement based on multilateral metasurfaces.Phys. Rev. Appl.,7: 054006.doi:10.1103/PhysRevApplied.7.054006 Qian J, Wang Y, Xia J P, Ge Y, Yuan S Q, et al. 2020. Broadband integrative acoustic asymmetric focusing lens based on mode-conversion meta-atoms.Appl. Phys. Lett.,116: 223505.doi:10.1063/5.0004579 Qiu H, Li F X. 2020. Manipulation of shear horizontal guided wave with arbitrary wave fronts by using metasurfaces.J. Phys. D:Appl. Phys.,53: 285301.doi:10.1088/1361-6463/ab850d Qiu H, Chen M T, Huan Q, Li F X. 2019. Steering and focusing of fundamental shear horizontal guided waves in plates by using multiple-strip metasurfaces.EPL,127: 46004.doi:10.1209/0295-5075/127/46004 Quan L, Alù A. 2019a. Hyperbolic sound propagation over nonlocal acoustic metasurfaces.Phys. Rev. Lett.,123: 244303.doi:10.1103/PhysRevLett.123.244303 Quan L, Alù A. 2019b. Passive acoustic metasurface with unitary reflection based on nonlocality.Phys. Rev. Appl.,11: 054077.doi:10.1103/PhysRevApplied.11.054077 Quan L, Radi Y, Sounas D L, Alù A. 2018. Maximum Willis coupling in acoustic scatterers.Phys. Rev. Lett.,120: 254301.doi:10.1103/PhysRevLett.120.254301 Rong J J, Ye W J. 2020. Multifunctional elastic metasurface design with topology optimization.Acta Mater.,185: 382-399.doi:10.1016/j.actamat.2019.12.017 Rong J J, Ye W J, Zhang S Y, Liu Y J. 2020. Frequency-coded passive multifunctional elastic metasurfaces.Adv. Funct. Mater.,30: 2005285.doi:10.1002/adfm.202005285 Ruan Y D, Liang X, Hu C J. 2020. Retroreflection of flexural wave by using elastic metasurface.J. Appl. Phys.,128: 045116.doi:10.1063/5.0005928 Schwan L, Umnova O, Boutin C, Groby J P. 2018. Nonlocal boundary conditions for corrugated acoustic metasurface with strong near-field interactions.J. Appl. Phys.,123: 091712.doi:10.1063/1.5011385 Shen C, Cummer S A. 2018. Harnessing multiple internal reflections to design highly absorptive acoustic metasurfaces.Phys. Rev. Appl.,9: 054009.doi:10.1103/PhysRevApplied.9.054009 Shen C, Díaz-Rubio A, Li J F, Cummer S A. 2018. A surface impedance-based three-channel acoustic metasurface retroreflector.Appl. Phys. Lett.,112: 183503.doi:10.1063/1.5025481 Shen C, Xie Y B, Li J F, Cummer S A, Jing Y. 2016. Asymmetric acoustic transmission through near-zero-index and gradient-index metasurfaces.Appl. Phys. Lett.,108: 223502.doi:10.1063/1.4953264 Shen X H, Sun C T, Barnhart M V, Huang G L. 2018. Elastic wave manipulation by using a phase-controlling meta-layer.J. Appl. Phys.,123: 091708.doi:10.1063/1.4996018 Shen Y X, Zhu X F, Cai F Y, Ma T, Li F, Xia X X, et al. 2019. Active acoustic metasurface: complete elimination of grating lobes for high-quality ultrasound focusing and controllable steering.Phys. Rev. Appl.,11: 034009.doi:10.1103/PhysRevApplied.11.034009 Shi C Z, Dubois M, Wang Y, Zhang X. 2017. High-speed acoustic communication by multiplexing orbital angular momentum.Proc. Natl. Acad. Sci. U. S. A.,114: 7250-7253.doi:10.1073/pnas.1704450114 Sigalas M M, Economou E N. 1992. Elastic and acoustic wave band structure.J. Sound Vib.,158: 377-382.doi:10.1016/0022-460X(92)90059-7 Siviloglou G A, Christodoulides D N. 2007. Accelerating finite energy Airy beams.Opt. Lett.,32: 979-981.doi:10.1364/OL.32.000979 Song A L, Chen T N, Wang X P, Wan L L. 2016. Waveform-preserved unidirectional acoustic transmission based on impedance-matched acoustic metasurface and phononic crystal.J. Appl. Phys.,120: 085106.doi:10.1063/1.4961659 Song A L, Li J F, Peng X Y, Shen C, Zhu X H, Chen T N, Cummer S A. 2019. Asymmetric absorption in acoustic metamirror based on surface impedance engineering.Phys. Rev. Appl.,12: 054048.doi:10.1103/PhysRevApplied.12.054048 Song X P, Chen T N, Li R. 2021a. Frequency band-selected one-way topological edge mode via acoustic metamaterials and metasurface.J. Appl. Phys.,130: 085101.doi:10.1063/5.0058546 Song X P, Chen T N, Zhu J. 2019a. Acoustic reprogrammable metasurface for the multi-frequency tri-channel retroreflector.Appl. Phys. A,125: 679.doi:10.1007/s00339-019-2967-0 Song X P, Chen T N, Huang W K, Chen C. 2021b. Frequency-selective modulation of reflected wave fronts using a four-mode coding acoustic metasurface.Phys. Lett. A,394: 127145.doi:10.1016/j.physleta.2021.127145 Song X P, Chen T N, Zhu J, Ding W, Liang Q X, Wang X P. 2020. Broadband and broad-angle asymmetric acoustic transmission by unbalanced excitation of surface evanescent waves based on single-layer metasurface.Phys. Lett. A,384: 126419.doi:10.1016/j.physleta.2020.126419 Song X P, Chen T N, Zhu J, He Y B, Zhang J Z. 2019b. A switchable sound tunnel by using an acoustic metasurface.J. Theor. Comput. Acoust.,27: 1950017.doi:10.1142/S2591728519500178 Song X P, Chen T N, Zhu J, He Y Q, Liu Z Q. 2019c. Broadband acoustic cloaking and disguising with full-rangle incident angles based on reconfigurable metasurface.Int. J. Mod. Phys. B,33: 1950273.doi:10.1142/S0217979219502734 Su G Y, Liu Y Q. 2020. Amplitude-modulated binary acoustic metasurface for perfect anomalous refraction.Appl. Phys. Lett.,117: 221901.doi:10.1063/5.0032509 Su X S, Norris A N. 2016. Focusing, refraction, and asymmetric transmission of elastic waves in solid metamaterials with aligned parallel gaps.J. Acoust. Soc. Am.,139: 3386-3394.doi:10.1121/1.4950770 Su X S, Lu Z C, Norris A N. 2018. Elastic metasurface for splitting SV- and P-waves in elastic solids.J. Appl. Phys.,123: 091701.doi:10.1063/1.5007731 Su Y C, Ko L H. 2022. Acoustic wave splitting and wave trapping designs.ASME J. Vib. Acoust.,144: 034502.doi:10.1115/1.4053713 Su Y C, Chen T Y, Ko L H, Lu M H. 2020. Design of metasurfaces to enable shear horizontal wave trapping.J. Appl. Phys.,128: 175107.doi:10.1063/5.0018872 Sun H T, Wang J S, Cheng Y, Wei Q, Liu X J. 2016. Modulation of water surface waves with a coiling-up-space metasurface.AIP Adv.,6: 055017.doi:10.1063/1.4950962 Sun Z Y, Shi Y, Sun X C, Jia H, Jin Z K, et al. 2021. Underwater acoustic multiplexing communication by pentamode metasurface.J Phys. D:Appl. Phys.,54: 205303.doi:10.1088/1361-6463/abe43e Tang H C, Chen Z S, Tang N, Li S F, Shen Y X, et al. 2018. Hollow-out patterning ultrathin acoustic metasurfaces for multifunctionalities using soft fiber/rigid bead networks.Adv. Funct. Mater.,28: 1801127.doi:10.1002/adfm.201801127 Tang H C, Hao Z Q, Zang J F. 2019. Nonplanar acoustic metasurface for focusing.J. Appl. Phys.,125: 154901.doi:10.1063/1.5082670 Tang K, Qiu C Y, Lu J Y, Ke M Z, Liu Z Y. 2015. Focusing and directional beaming effects of airborne sound through a planar lens with zigzag slits.J. Appl. Phys.,117: 024503.doi:10.1063/1.4905910 Tang K, Qiu C, Ke M Z, Lu J, Ye Y, Liu Z Y. 2014. Anomalous refraction of airborne sound through ultrathin metasurfaces.Sci. Rep.,4: 6517. Tang S, Ren B, Feng Y X, Song J, Jiang Y Y. 2021a. Asymmetric acoustic beam shaping based on monolayer binary metasurfaces.Appl. Phys. Express,14: 085504.doi:10.35848/1882-0786/ac15bf Tang S, Ren B, Feng Y X, Song J, Jiang Y Y. 2021b. The generation of acoustic Airy beam with selective band based on binary metasurfaces: customized on demand.Appl. Phys. Lett.,119: 071907.doi:10.1063/5.0060032 Tang S, Ren B, Feng Y X, Song J, Jiang Y Y. 2022. Broadband controllable asymmetric accelerating beam via bilayer binary acoustic metasurfaces.Ann. Phys.(Berlin) ,534: 2100208.doi:10.1002/andp.202100208 Tang W P, Ren C Y. 2017. Total transmission of airborne sound by impedance-matched ultra-thin metasurfaces.J. Phys. D:Appl. Phys.,50: 105102.doi:10.1088/1361-6463/aa5a86 Tang W P, Ren C Y, Tong S S, Huang X C. 2019. Sandwich-like space-coiling metasurfaces for weak-dispersion high-efficiency transmission.Appl. Phys. Lett.,115: 134102.doi:10.1063/1.5120494 Tang Y G, Zhang Y, Xie B Y, Cheng H, Tian J G, Chen S Q. 2022. Transmission-reflection-integrated multifunctional continuously tunable metasurfaces for decoupled modulation of acoustic waves.Phys. Rev. Appl.,17: 044027.doi:10.1103/PhysRevApplied.17.044027 Tian Y, Wei Q, Cheng Y, Liu X J. 2017. Acoustic holography based on composite metasurface with decoupled modulation of phase and amplitude.Appl. Phys. Lett.,110: 191901.doi:10.1063/1.4983282 Tian Y, Wei Q, Cheng Y, Xu Z, Liu X J. 2015. Broadband manipulation of acoustic wavefronts by pentamode metasurface.Appl. Phys. Lett.,107: 221906.doi:10.1063/1.4936762 Tian Z H, Yu L Y. 2019. Elastic phased diffraction gratings for manipulation of ultrasonic guided waves in solids.Phys. Rev. Appl.,11: 024052.doi:10.1103/PhysRevApplied.11.024052 Tian Z H, Shen C, Li J F, Reit E, Gu Y Y, et al. 2019. Programmable acoustic metasurfaces.Adv. Funct. Mater.,29: 1808489.doi:10.1002/adfm.201808489 Tong S S, Ren C Y, Tang W P. 2021. Asymmetric sandwich-like elements for bianisotropic acoustic metasurfaces.J. Phys. D:Appl. Phys.,54: 485101.doi:10.1088/1361-6463/ac2113 Van Damme B, Hannema G, Sales Souza L, Weisse B, Tallarico D, Bergamini A. 2021. Inherent non-linear damping in resonators with inertia amplification.Appl. Phys. Lett.,119: 061901.doi:10.1063/5.0061826 Wang H P, Gao W J, Zhu R R, Wang Z H, Xu Z W, Zheng B. 2019. Ultrathin acoustic metasurface holograms with arbitrary phase control.Appl. Sci.,9: 3585.doi:10.3390/app9173585 Wang Q Y, del Hougne P, Ma G C. 2022. Controlling the spatiotemporal response of transient reverberating sound.Phys. Rev. Appl.,17: 044007.doi:10.1103/PhysRevApplied.17.044007 Wang T, Ke M Z, Li W P, Yang Q, Qiu C Y, Liu Z Y. 2016. Particle manipulation with acoustic vortex beam induced by a brass plate with spiral shape structure.Appl. Phys. Lett.,109: 123506.doi:10.1063/1.4963185 Wang W Q, Xie Y B, Popa B I, Cummer S A. 2016. Subwavelength diffractive acoustics and wavefront manipulation with a reflective acoustic metasurface.J. Appl. Phys.,120: 195103.doi:10.1063/1.4967738 Wang W, Iglesias J, Jin Y B, Djafari-Rouhani B, Khelif A. 2021a. Experimental realization of a pillared metasurface for flexural wave focusing.APL Mater.,9: 051125.doi:10.1063/5.0052278 Wang W, Tan Y, Liang B, Ma G C, Wang S B, Cheng J C. 2021b. Generalized momentum conservation and Fedorov-Imbert linear shift of acoustic vortex beams at a metasurface.Phys. Rev. B,104: 174301.doi:10.1103/PhysRevB.104.174301 Wang X L, Yang J, Liang B, Cheng J C. 2020. Tunable annular acoustic metasurface for transmitted wavefront modulation.Appl. Phys. Express,13: 014002.doi:10.7567/1882-0786/ab59a5 Wang X P, Wan L L, Chen T N, Liang Q X, Song A L. 2016a. Broadband acoustic diode by using two structured impedance-matched acoustic metasurfaces.Appl. Phys. Lett.,109: 044102.doi:10.1063/1.4960019 Wang X P, Wan L L, Chen T N, Song A L, Du X W. 2016b. Broadband reflected wavefronts manipulation using structured phase gradient metasurfaces.AIP Adv.,6: 065320.doi:10.1063/1.4954750 Wang X P, Wan L L, Chen T N, Song A L, Wang F. 2016c. Broadband unidirectional acoustic cloak based on phase gradient metasurfaces with two flat acoustic lenses.J. Appl. Phys.,120: 014902.doi:10.1063/1.4954326 Wang X, Fang X S, Mao D X, Jing Y, Li Y. 2019. Extremely asymmetrical acoustic metasurface mirror at the exceptional point.Phys. Rev. Lett.,123: 214302.doi:10.1103/PhysRevLett.123.214302 Wang X, Mao D X, Li Y. 2017. Broadband acoustic skin cloak based on spiral metasurfaces.Sci. Rep.,7: 11604.doi:10.1038/s41598-017-11846-1 Wang Y F, Wang Y Z, Wu B, Chen W Q, Wang Y S. 2020. Tunable and active phononic crystals and metamaterials.ASME Appl. Mech. Rev.,72: 040801.doi:10.1115/1.4046222 Wang Y H, Cheng Y, Liu X J. 2019. Modulation of acoustic waves by a broadband metagrating.Sci. Rep.,9: 7271.doi:10.1038/s41598-019-43850-y Wang Y, Qian J, Xia J P, Ge Y, Yuan S Q, Sun H X, Liu X J. 2021. Acoustic Bessel vortex beam by quasi-three-dimensional reflected metasurfaces.Micromachines,12: 1388.doi:10.3390/mi12111388 Weng J K, Ding Y J, Hu C B, Zhu X F, Liang B, Yang J, Cheng J C. 2020. Meta-neural-network for real-time and passive deep-learning-based object recognition.Nat. Commun.,11: 6309.doi:10.1038/s41467-020-19693-x Weng J K, Zhu Y F, Liang B, Yang J, Cheng J C. 2021. Wavelength-dependent multi-functional wavefront manipulation for reflected acoustic waves.Appl. Phys. Express,13: 094003. Wu X X, Xia X X, Tian J X, Liu Z Y, Wen W J. 2016. Broadband reflective metasurface for focusing underwater ultrasonic waves with linearly tunable focal length.Appl. Phys. Lett.,108: 163502.doi:10.1063/1.4947437 Wunenburger R, Lozano J I V, Brasselet E. 2015. Acoustic orbital angular momentum transfer to matter by chiral scattering.New J. Phys.,17: 103022.doi:10.1088/1367-2630/17/10/103022 Xia J P, Zhang X T, Sun H X, Yuan S Q, Qian J, Ge Y. 2018. Broadband tunable acoustic asymmetric focusing lens from dual-layer metasurfaces.Phys. Rev. Appl.,10: 014016.doi:10.1103/PhysRevApplied.10.014016 Xia M, Zhang X, Wu F G, Wang L C, Liu Y C, Chen Z H, Yao Y W. 2020. Broadband high-quality airy beams via lossy acoustic gradient-index metasurfaces.Solid State Commun.,308: 113810.doi:10.1016/j.ssc.2019.113810 Xia R Y, Yi J L, Chen Z, Li Z. 2019. In situ steering of shear horizontal waves in a plate by a tunable electromechanical resonant elastic metasurface.J. Phys. D:Appl. Phys.,53: 095302. Xie B Y, Cheng H, Tang K, Liu Z Y, Chen S Q, Tian J G. 2017a. Multiband asymmetric transmission of airborne sound by coded metasurfaces.Phys. Rev. Appl.,7: 024010.doi:10.1103/PhysRevApplied.7.024010 Xie B Y, Tang K, Cheng H, Liu Z Y, Chen S Q, Tian J G. 2017b. Coding acoustic metasurfaces.Adv. Mater.,29: 1603507.doi:10.1002/adma.201603507 Xie H F, Hou Z L. 2021. Nonlocal metasurface for acoustic focusing.Phys. Rev. Appl.,15: 034054.doi:10.1103/PhysRevApplied.15.034054 Xie S H, Fang X S, Li P Q, Huang S B, Peng Y G, Shen Y X, Li Y, Zhu X F. 2020. Tunable double-band perfect absorbers via acoustic metasurfaces with nesting helical tracks.Chin. Phys. Lett.,37: 054301.doi:10.1088/0256-307X/37/5/054301 Xie Y B, Shen C, Wang W Q, Li J F, Suo D J, et al. 2016. Acoustic holographic rendering with two-dimensional metamaterial-based passive phased array.Sci. Rep.,6: 35437.doi:10.1038/srep35437 Xie Y B, Wang W Q, Chen H Y, Konneker A, Popa B I, Cummer S A. 2014. Wavefront modulation and subwavelength diffractive acoustics with an acoustic metasurface.Nat. Commun.,5: 5553.doi:10.1038/ncomms6553 Xu M X, Lee P V S, Collins D J. 2022. Microfluidic acoustic sawtooth metasurfaces for patterning and separation using traveling surface acoustic waves.Lab Chip,22: 90-99.doi:10.1039/D1LC00711D Xu W K, Zhang M, Lin Z B, Liu C L, Qi W C, Wang W. 2019a. Anomalous refraction manipulation of Lamb waves using single-groove metasurfaces.Phys. Scr.,94: 105807.doi:10.1088/1402-4896/ab2b01 Xu W K, Zhang M, Ning J Y, Wang W, Yang T Z. 2019b. Anomalous refraction control of mode-converted elastic wave using compact notch-structured metasurface.Mater. Res. Express,6: 065802.doi:10.1088/2053-1591/ab0dc8 Xu Z H, Li P, Liu M Y, Du Q J, Guo Y F, Peng P. 2022. An ultrathin acoustic metasurface composed of an anisotropic three component resonator.Appl. Phys. Express,15: 027004.doi:10.35848/1882-0786/ac4a0e Xu Z K, Qin L, Xu W, Fang S H, Wang J Y. 2021. Design approach of perforated labyrinth based acoustic metasurface for selective acoustic levitation manipulation.Sci. Rep.,11: 7619.doi:10.1038/s41598-021-87179-x Yan P Y, Zhu X F, Chen D, Wu D J. 2021. Perfect multiple splitting with arbitrary power distribution by acoustic metasurfaces.Europhys. Lett.,134: 48003.doi:10.1209/0295-5075/134/48003 Yang X W, Kweun M, Kim Y Y. 2019. Monolayer metamaterial for full mode-converting transmission of elastic waves.Appl. Phys. Lett.,115: 071901.doi:10.1063/1.5109758 Yang X Y, Fei C L, Li D, Li Z X, Sun X H, Hou S, Feng W, Yang Y T. 2019. Analysis of dynamic high-frequency acoustic field control by metasurfaces lens.AIP Adv.,9: 115119.doi:10.1063/1.5124119 Yaw Z, Zhou W J, Chen Z Y, Lim C W. 2021. Stiffness tuning of a functional-switchable active coding elastic metasurface.Int. J. Mech. Sci.,207: 106654.doi:10.1016/j.ijmecsci.2021.106654 Ye L P, Qiu C Y, Lu J Y, Tang K, Jia H, et al. 2016. Making sound vortices by metasurfaces.AIP Adv.,6: 085007.doi:10.1063/1.4961062 Yilmaz C, Hulbert G M, Kikuchi N. 2007. Phononic band gaps induced by inertial amplification in periodic media.Phys. Rev. B.,76: 054309.doi:10.1103/PhysRevB.76.054309 Yu G K, Qiu Y P, Li Y, Wang X L, Wang N. 2021. Underwater acoustic stealth by a broadband 2-bit coding metasurface.Phys. Rev. Appl.,15: 064064.doi:10.1103/PhysRevApplied.15.064064 Yu N F, Genevet P, Kats M A, Aieta F, Tetienne J P, Capasso F, Gaburro Z. 2011. Light propagation with phase discontinuities: Generalized laws of reflection and refraction.Science,334: 333-337.doi:10.1126/science.1210713 Yuan B G, Cheng Y, Liu X J. 2015. Conversion of sound radiation pattern via gradient acoustic metasurface with space-coiling structure.Appl. Phys. Express,8: 027301.doi:10.7567/APEX.8.027301 Yuan M, Cao Z P, Luo J, Ohayon R. 2018. Acoustic metastructure for effective low-frequency acoustic energy harvesting.J. Low Freq. Noise Vib. Act. Control,37: 1015-1029.doi:10.1177/1461348418794832 Yuan S M, Chen A L, Wang Y S. 2020a. Switchable multifunctional fish-bone elastic metasurface for transmitted flexural wave modulation.J. Sound Vib.,470: 115168.doi:10.1016/j.jsv.2019.115168 Yuan S M, Chen A L, Cao L Y, Zhang H W, Fan S W, et al. 2020b. Tunable multifunctional fish-bone elastic metasurface for wavefront manipulation of transmitted in-plane waves.J. Appl. Phys.,128: 224502.doi:10.1063/5.0029045 Yuan S M, Ma T X, Chen A L, Wang Y S. 2018. Liquid-assisted tunable metasurface for simultaneous manipulation of surface elastic and acoustic waves.AIP Adv.,8: 035026.doi:10.1063/1.5011194 Zahra S, Ma L, Wang W J, Li J, Chen D X, et al. 2021. Electromagnetic metasurfaces and reconfigurable metasurfaces: a review.Front. Phys.,8: 593411.doi:10.3389/fphy.2020.593411 Zeng J F, Zhang X, Wu F G, Han L X, Wang Q, et al. 2019. Phase modulation of acoustic vortex beam with metasurfaces.Phys. Lett. A,383: 2640-2644.doi:10.1016/j.physleta.2019.05.027 Zeng L H, Zhang J, Liu Y L, Zhao Y X, Hu N. 2019. Asymmetric transmission of elastic shear vertical waves in solids.Ultrasonics,96: 34-39.doi:10.1016/j.ultras.2019.03.016 Zeng L S, Shen Y X, Fang X S, Li Y, Zhu X F. 2021. Experimental realization of ultrasonic retroreflection tweezing via metagratings.Ultrasonics,117: 106548.doi:10.1016/j.ultras.2021.106548 Zeng Y, Cao L Y, Zhu Y F, Wang Y F, Du Q J, Wang Y S, Assouar B. 2021. Coupling the first and second attenuation zones in seismic metasurface.Appl. Phys. Lett.,119: 013501.doi:10.1063/5.0054606 Zhai S L, Chen H J, Ding C L, Shen F L, Luo C R, Zhao X P. 2015. Manipulation of transmitted wave front using ultrathin planar acoustic metasurfaces.Appl. Phys. A,120: 1283-1289.doi:10.1007/s00339-015-9379-6 Zhai S L, Ding C L, Chen H J, Shen F L, Luo C R, Zhao X P. 2016. Anomalous manipulation of acoustic wavefront with an ultrathin planar metasurface.ASME J. Vib. Acoust.,138: 041019.doi:10.1115/1.4033258 Zhai S L, Song K, Ding C L, Wang Y B, Dong Y B, Zhao X P. 2018. Tunable acoustic metasurface with high-Q spectrum splitting.Materials,11: 1976.doi:10.3390/ma11101976 Zhang C, Cao W K, Wu L T, Ke J C, Jing Y, et al. 2021. A reconfigurable active acoustic metalens.Appl. Phys. Lett.,118: 133502.doi:10.1063/5.0045024 Zhang H K, Zhang W X, Liao Y H, Zhou X M, Li J F, et al. 2020. Creation of acoustic vortex knots.Nat. Commun.,11: 3956.doi:10.1038/s41467-020-17744-x Zhang H, Wei Z, Fan L, Qu J, Zhang S Y. 2016. Tunable sound transmission at impedance-mismatched fluidic interface assisted by a composite waveguide.Sci. Rep.,6: 34688.doi:10.1038/srep34688 Zhang J, Su X S, Liu Y L, Zhao Y X, Jing Y, Hu N. 2019. Metasurface constituted by thin composite beams to steer flexural waves in thin plates.Int. J. Solids Struc.,162: 14-20.doi:10.1016/j.ijsolstr.2018.11.025 Zhang J, Su X S, Pennec Y, Jing Y, Liu X F, Hu N. 2018a. Wavefront steering of elastic shear vertical waves in solids via a composite-plate-based metasurface.J. Appl. Phys.,124: 164505.doi:10.1063/1.5049515 Zhang J, Tian Y, Cheng Y, Liu X J. 2020a. Acoustic holography using composite metasurfaces.Appl. Phys. Lett.,116: 030501.doi:10.1063/1.5132629 Zhang J, Yang Y, Zhu B P, Li X J, Jin J, et al. 2018b. Multifocal point beam forming by a single ultrasonic transducer with 3D printed holograms.Appl. Phys. Lett.,113: 243502.doi:10.1063/1.5058079 Zhang J, Zhang X B, Xu F L, Ding X Y, Deng M X, et al. 2020b. Vibration control of flexural waves in thin plates by 3D-printed metasurfaces.J. Sound Vib.,481: 115440.doi:10.1016/j.jsv.2020.115440 Zhang N L, Zhao S D, Dong H W, Wang Y S, Zhang Ch. 2022. Reflection-type broadband acoustic coding metasurfaces for acoustic focusing and splitting.Appl. Phys. Lett.,120: 142201.doi:10.1063/5.0087339 Zhang P, Li T C, Zhu J, Zhu X F, Yang S, et al. 2014. Generation of acoustic self-bending and bottle beams by phase engineering.Nat. Commun.,5: 4316.doi:10.1038/ncomms5316 Zhang S Z, Shu S W, Bian X H. 2022. Tunability for anomalous refraction of flexural wave in a magneto-elastic metasurface by magnetic field and pre-stress.Appl. Phys. Express,15: 027003.doi:10.35848/1882-0786/ac4925 Zhang X D, Chen H, Zhao Z G, Zhao A G, Cai X, Wang L. 2020. Experimental demonstration of a broadband waterborne acoustic metasurface for shifting reflected waves.J. Appl. Phys.,127: 174902.doi:10.1063/1.5139008 Zhang X, Ma J Y, Li M Y, You Z, Wang X Y, et al. 2022. Kirigami-based metastructures with programmable multistability.Proc. Natl. Acad. Sci.,119: e2117649119.doi:10.1073/pnas.2117649119 Zhang Y, Cheng H, Tian J G, Chen S Q. 2020. Frequency-selected bifunctional coding acoustic metasurfaces.Phys. Rev. Appl.,14: 064057.doi:10.1103/PhysRevApplied.14.064057 Zhang Y, Xie B Y, Liu W W, Cheng H, Chen S Q, Tian J G. 2019. Anomalous reflection and vortex beam generation by multi-bit coding acoustic metasurfaces.Appl. Phys. Lett.,114: 091905.doi:10.1063/1.5087636 Zhao J J, Li B W, Chen Z N, Qiu C W. 2013a. Manipulating acoustic wavefront by inhomogeneous impedance and steerable extraordinary reflection.Sci. Rep.,3: 2537.doi:10.1038/srep02537 Zhao J J, Li B W, Chen Z N, Qiu C W. 2013b. Redirection of sound waves using acoustic metasurface.Appl. Phys. Lett.,103: 151604.doi:10.1063/1.4824758 Zhao J Y, Chremmos I D, Song D H, Christodoulides D N, Efremidis N K, Chen Z G. 2015. Curved singular beams for three-dimensional particle manipulation.Sci. Rep.,5: 12086.doi:10.1038/srep12086 Zhao S D, Chen A L, Wang Y S, Zhang Ch. 2018. Continuously tunable acoustic metasurface for transmitted wavefront modulation.Phys. Rev. Appl.,10: 054066.doi:10.1103/PhysRevApplied.10.054066 Zhao S D, Dong H W, Miao X B, Wang Y S, Zhang Ch. 2022. Broadband programmable coding metasurfaces with 2-bit manipulations.Phys. Rev. Appl.,17: 034019.doi:10.1103/PhysRevApplied.17.034019 Zhao S P, Hu Y X, Lu J, Qiu X J, Cheng J C, Burnett I. 2014. Delivering sound energy along an arbitrary convex trajectory.Sci. Rep.,4: 6628. Zhao Y P, Liu J J, Liang B, Cheng J C. 2020. An ultrathin planar acoustic metasurface diffuser with narrowband uniform reflection.AIP Adv.,10: 085122.doi:10.1063/5.0011243 Zheng M Y, Park C Il, Liu X N, Zhu R, Hu G K, Kim Y Y. 2020. Non-resonant metasurface for broadband elastic wave mode splitting.Appl. Phys. Lett.,116: 171903.doi:10.1063/5.0005408 Zheng Z, Zhang B F, Chen H, Ding J P, Wang H T. 2011. Optical trapping with focused Airy beams.Appl. Optics,50: 43-49.doi:10.1364/AO.50.000043 Zhou H T, Fan S W, Li X S, Fu W X, Wang Y F, Wang Y S. 2020. Tunable arc-shaped acoustic metasurface carpet cloak.Smart Mater. Struct.,29: 065016 Zhou H T, Fu W X, Li X S, Wang Y F, Wang Y S. 2022. Loosely coupled reflective impedance metasurfaces: Precise manipulation of waterborne sound by top ology optimization.Mech. Syst. Signal Process.,177: 109228.doi:10.1016/j.ymssp.2022.109228 Zhou H T, Fu W X, Wang Y F, Wang Y S. 2021a. High-efficiency ultrathin nonlocal waterborne acoustic metasurface.Phys. Rev. Appl.,15: 044046.doi:10.1103/PhysRevApplied.15.044046 Zhou H T, Fu W X, Wang Y F, Wang Y S, Laude V, Zhang Ch. 2021b. Ultra-broadband passive acoustic metasurface for wide-angle carpet cloaking.Mater. Des.,199: 109414.doi:10.1016/j.matdes.2020.109414 Zhou Q X, Zhang J, Ren X M, Xu Z, Liu X J. 2020. Multi-bottle beam generation using acoustic holographic lens.Appl. Phys. Lett.,116: 133502.doi:10.1063/5.0003379 Zhu H F, Semperlotti F. 2016. Anomalous refraction of acoustic guided waves in solids with geometrically tapered metasurfaces.Phys. Rev. Lett.,117: 034302.doi:10.1103/PhysRevLett.117.034302 Zhu H F, Patnaik S, Walsh T F, Jared B H, Semperlotti F. 2020. Nonlocal elastic metasurfaces: Enabling broadband wave control via intentional nonlocality.Proc. Natl. Acad. Sci. U. S. A.,117: 26099-26108.doi:10.1073/pnas.2004753117 Zhu H F, Walsh T F, Semperlotti F. 2018. Total internal reflection elastic metasurfaces-design and application to structural vibration isolation.Appl. Phys. Lett.,113: 221903.doi:10.1063/1.5052538 Zhu H F, Walsh T F, Jared B H, Semperlotti F. 2022. On the broadband vibration isolation performance of nonlocal total-internal-reflection metasurfaces.J Sound Vib.,522: 116670.doi:10.1016/j.jsv.2021.116670 Zhu X F, Lau S K. 2019a. Perfect anomalous reflection and refraction with binary acoustic metasurfaces.J. Appl. Phys.,126: 224504.doi:10.1063/1.5124040 Zhu X F, Lau S K. 2019b. Reflected wave manipulation via acoustic metamaterials with decoupled amplitude and phase.Appl. Phys. A,125: 392.doi:10.1007/s00339-019-2687-5 Zhu X F, Li K, Zhang P, Zhu J, Zhang J T, Tian C, Liu S C. 2016. Implementation of dispersion-free slow acoustic wave propagation and phase engineering with helical-structured metamaterials.Nat. Commun.,7: 11731.doi:10.1038/ncomms11731 Zhu X H, Li J F, Shen C, Peng X Y, Song A L, Li L Q, Cummer S A. 2020. Non-reciprocal acoustic transmission via space-time modulated membranes.Appl. Phys. Lett.,116: 034101.doi:10.1063/1.5132699 Zhu Y F, Assouar B. 2019a. Multifunctional acoustic metasurface based on an array of Helmholtz resonators.Phys. Rev. B,99: 174109.doi:10.1103/PhysRevB.99.174109 Zhu Y F, Assouar B. 2019b. Systematic design of multiplexed-acoustic-metasurface hologram with simultaneous amplitude and phase modulations.Phys. Rev. Mater.,3: 045201.doi:10.1103/PhysRevMaterials.3.045201 Zhu Y F, Fan X D, Liang B, Yang J, Yang J, Yin L L, Cheng J C. 2016. Multi-frequency acoustic metasurface for extraordinary reflection and sound focusing.AIP Adv.,6: 121702.doi:10.1063/1.4968607 Zhu Y F, Gerard N J, Xia X X, Stevenson G C, Cao L Y, Fan S W, Spadaccini C M, Jing Y, Assouar B. 2021a. Systematic design and experimental demonstration of transmission-type multiplexed acoustic meta-holograms.Adv. Funct. Mater.,31: 2101947.doi:10.1002/adfm.202101947 Zhu Y F, Hu J, Fan X D, Yang J, Liang B, Zhu X F, Cheng J C. 2018. Fine manipulation of sound via lossy metamaterials with independent and arbitrary reflection amplitude and phase.Nat. Commun.,9: 1632.doi:10.1038/s41467-018-04103-0 Zhu Y F, Merkel A, Donda K, Fan S W, Assouar B. 2021b. Nonlocal acoustic metasurface for ultrabroadband sound absorption.Phys. Rev. B,103: 064102.doi:10.1103/PhysRevB.103.064102 Zhu Y F, Zou X Y, Li R Q, Jiang X, Tu J, et al. 2015a. Dispersionless manipulation of reflected acoustic wavefront by subwavelength corrugated surface.Sci. Rep.,5: 10966.doi:10.1038/srep10966 Zhu Y F, Zou X Y, Liang B, Cheng J C. 2015b. Acoustic one-way open tunnel by using metasurface.Appl. Phys. Lett.,107: 113501.doi:10.1063/1.4930300 Zhu Y F, Zou X Y, Liang B, Cheng J C. 2015c. Broadband unidirectional transmission of sound in unblocked channel.Appl. Phys. Lett.,106: 173508.doi:10.1063/1.4919537 Zhu Y F, Fan X, Liang B, Cheng J C, Jing Y. 2017. Ultrathin acoustic metasurface-based Schroeder diffuser.Phys. Rev. X,7: 021034. Zou H Z, Li P, Peng P. 2020. An ultra-thin acoustic metasurface with multiply resonant units.Phys. Lett. A,384: 126151.doi:10.1016/j.physleta.2019.126151 Zou H Z, Xu Y L, Li P, Peng P. 2022. Reflected continuously tunable acoustic metasurface with rotatable space coiling-up structure.Phys. Lett. A,426: 127891.doi:10.1016/j.physleta.2021.127891 Zou Z G, Lirette R, Zhang L K. 2020. Orbital angular momentum reversal and asymmetry in acoustic vortex beam reflection.Phys. Rev. Lett.,125: 074301.doi:10.1103/PhysRevLett.125.074301 Zuo S Y, Cheng Y, Liu X J. 2019a. Tunable perfect negative reflection based on an acoustic coding metasurface.Appl. Phys. Lett.,114: 203505.doi:10.1063/1.5093700 Zuo S Y, Tian Y, Cheng Y, Deng M X, Hu N, Liu X J. 2019b. Asymmetric coding metasurfaces for the controllable projection of acoustic images.Phys. Rev. Mater.,3: 065204.doi:10.1103/PhysRevMaterials.3.065204 Zuo S Y, Tian Y, Wei Q, Cheng Y, Liu X J. 2018a. Acoustic analog computing based on a reflective metasurface with decoupled modulation of phase and amplitude.J. Appl. Phys.,123: 091704.doi:10.1063/1.5004617 Zuo S Y, Wei Q, Cheng Y, Liu X J. 2017. Mathematical operations for acoustic signals based on layered labyrinthine metasurfaces.Appl. Phys. Lett.,110: 011904.doi:10.1063/1.4973705 Zuo S Y, Wei Q, Tian Y, Cheng Y, Liu X J. 2018b. Acoustic analog computing system based on labyrinthine metasurfaces.Sci. Rep.,8: 10103.doi:10.1038/s41598-018-27741-2